METHOD AND DEVICE FOR PLASMA-TREATING WORKPIECES
    3.
    发明申请
    METHOD AND DEVICE FOR PLASMA-TREATING WORKPIECES 审中-公开
    方法和设备用于工件的等离子体处理

    公开(公告)号:WO2005123979A2

    公开(公告)日:2005-12-29

    申请号:PCT/DE2005000629

    申请日:2005-04-09

    CPC classification number: H01J37/32779 B65G29/00 C23C16/511 C23C16/54

    Abstract: The method and device serve to plasma treat workpieces. The workpieces are placed inside a plasma chamber of a treatment station. Said plasma chamber can be at least partially evacuated and is conveyed by a rotatable plasma wheel along a closed circulating path. At least two workpieces are positioned inside the treatment station by retaining elements. At least two retaining elements of the treatment station are likewise positioned in a working position while being, with regard to one another, at a different radial distance from a rotation axis of the plasma wheel.

    Abstract translation: 该方法和设备被用于工件的等离子体处理。 将工件插入到处理站的至少部分地抽空等离子体室,其中所述等离子体腔室由沿着闭合循环路径的可旋转轮的血浆输送。 至少两个工件由Behandllulngsstation内支撑构件的位置。 在相对于彼此具有不同的径向距离处的工作位置的处理站中的至少两个保持元件也被定位于等离子体车轮的旋转轴线。

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