公开(公告)号：WO2005024404B1

公开(公告)日：2005-05-19

申请号：PCT/US2004029189

申请日：2004-09-03

Applicant: KLA TENCOR TECHNOLOGIES ,  LANGE STEVE R ,  MARELLA PAUL FRANK ,  CEGLIO NAT ,  HWANG SHIOW-HWEI ,  FU TAO-YI

Inventor： LANGE STEVE R ,  MARELLA PAUL FRANK ,  CEGLIO NAT ,  HWANG SHIOW-HWEI ,  FU TAO-YI

IPC: G01N21/95

CPC classification number: G01N21/9501 ,  G01N21/8806

Abstract: Methods and systems for inspection of a specimen using different parameters are provided. One computer-implemented method includes determining optimal parameters for inspection based on selected defects. This method also includes setting parameters of an inspection system at the optimal parameters prior to inspection. Another method for inspecting a specimen includes illuminating the specimen with light having a wavelength below about 350 nm and with light having a wavelength above about 350 nm. The method also includes processing signals representative of light collected from the specimen to detect defects or process variations on the specimen. One system configured to inspect a specimen includes a first optical subsystem coupled to a broadband light source and a second optical subsystem coupled to a laser. The system also includes a third optical subsystem configured to couple light from the first and second optical subsystems to an objective, which focuses the light onto the specimen.

Abstract translation: 提供了使用不同参数检查试样的方法和系统。 一种计算机实现的方法包括基于所选择的缺陷来确定用于检查的最佳参数。 该方法还包括在检查之前将检查系统的参数设置为最佳参数。 用于检查样品的另一种方法包括用波长低于约350nm的光和波长高于约350nm的光照射样品。 该方法还包括处理代表从样品收集的光的信号，以检测样品上的缺陷或过程变化。 配置成检查样本的一个系统包括耦合到宽带光源的第一光学子系统和耦合到激光器的第二光学子系统。 该系统还包括配置成将来自第一和第二光学子系统的光耦合到物镜的第三光学子系统，其将光聚焦到样本上。

公开(公告)号：WO2012148777A1

公开(公告)日：2012-11-01

申请号：PCT/US2012/034276

申请日：2012-04-19

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  TAO, Yi ,  LEE, Hojin ,  ZHONG, Fan

Inventor： TAO, Yi ,  LEE, Hojin ,  ZHONG, Fan

IPC: G02B26/00

CPC classification number: G02B26/001

Abstract: This disclosure provides mechanical layers and methods of forming the same. In one aspect, a method of forming a pixel includes depositing a black mask on a substrate, depositing an optical stack over the black mask, and forming a mechanical layer over the optical stack. The black mask is disposed along at least a portion of a side of the pixel, and the mechanical layer defines a cavity between the mechanical layer and the optical stack. The mechanical layer includes a reflective layer, a dielectric layer, and a cap layer, and the dielectric layer is disposed between the reflective layer and the cap layer. The method further includes forming a notch in the dielectric layer of the mechanical layer along the side of the pixel so as to reduce the overlap of the dielectric layer with the black mask along the side of the pixel.

Abstract translation: 本公开提供了机械层及其形成方法。 一方面，形成像素的方法包括在衬底上沉积黑色掩模，在黑色掩模上沉积光学堆叠，以及在光学堆叠上形成机械层。 黑色掩模沿着像素的一侧的至少一部分设置，并且机械层在机械层和光学堆叠之间限定空腔。 机械层包括反射层，电介质层和盖层，并且介电层设置在反射层和盖层之间。 该方法还包括沿着像素的侧面在机械层的电介质层中形成凹口，以便沿像素的侧面减小电介质层与黑色掩模的重叠。

公开(公告)号：WO2011119379A2

公开(公告)日：2011-09-29

申请号：PCT/US2011/028549

申请日：2011-03-15

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  TAO, Yi ,  ZHONG, Fan ,  SASAGAWA, Teruo

Inventor： TAO, Yi ,  ZHONG, Fan ,  SASAGAWA, Teruo

IPC: B81B3/00

CPC classification number: B81B3/0072 ,  B81B2201/047 ,  G02B5/284 ,  G02B26/001 ,  G09G3/3466

Abstract: Mechanical layers and methods of shaping mechanical layers are disclosed. In one embodiment, a method includes depositing a support layer (85), a sacrificial layer (84) and a mechanical layer (34) over a substrate (20), and forming a support post (60) from the support layer. A kink (90) is formed adjacent to the support post in the mechanical layer. The kink comprises a rising edge (91) and a falling edge (92), and the kink is configured to control the shaping and curvature of the mechanical layer upon removal of the sacrificial layer.

Abstract translation: 公开了机械层和机械层成型方法。 在一个实施例中，一种方法包括在衬底（20）上沉积支撑层（85），牺牲层（84）和机械层（34），以及从支撑层形成支撑柱（60）。 在机械层中邻近支撑柱形成扭结（90）。 扭结包括上升沿（91）和下降缘（92），并且扭结构造成在去除牺牲层时控制机械层的成形和曲率。

公开(公告)号：WO2010111153A3

公开(公告)日：2010-09-30

申请号：PCT/US2010/028050

申请日：2010-03-19

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  TAO, Yi ,  ZHONG, Fan

Inventor： TAO, Yi ,  ZHONG, Fan

IPC: B81B3/00 ,  G02B26/00

Abstract: An electromechanical systems device includes a plurality of supports disposed over a substrate and a deformable reflective layer disposed over the plurality of supports. The deformable reflective layer includes a plurality of substantially parallel columns extending in a first direction. Each column has one or more slots extending in a second direction generally perpendicular to the first direction. The slots can be created at boundary edges of sub-portions of the columns so as to partially mechanically separate the sub-portions without electrically disconnecting them. A method of fabricating an electromechanical device includes depositing an electrically conductive deformable reflective layer over a substrate, removing one or more portions of the deformable layer to form a plurality of electrically isolated columns, and forming at least one crosswise slot in at least one of the columns.

公开(公告)号：WO2010111153A2

公开(公告)日：2010-09-30

申请号：PCT/US2010028050

申请日：2010-03-19

Applicant: QUALCOMM MEMS TECHNOLOGIES INC ,  TAO YI ,  ZHONG FAN

Inventor： TAO YI ,  ZHONG FAN

IPC: B81B3/00 ,  B81B7/00

CPC classification number: G02B26/001 ,  B81B3/0086 ,  B81B2201/047 ,  B81B2203/053 ,  B81B2207/053

Abstract: An electromechanical systems device includes a plurality of supports disposed over a substrate and a deformable reflective layer disposed over the plurality of supports. The deformable reflective layer includes a plurality of substantially parallel columns extending in a first direction. Each column has one or more slots extending in a second direction generally perpendicular to the first direction. The slots can be created at boundary edges of sub-portions of the columns so as to partially mechanically separate the sub-portions without electrically disconnecting them. A method of fabricating an electromechanical device includes depositing an electrically conductive deformable reflective layer over a substrate, removing one or more portions of the deformable layer to form a plurality of electrically isolated columns, and forming at least one crosswise slot in at least one of the columns.

Abstract translation: 机电系统装置包括设置在基板上的多个支撑件和设置在多个支撑件上的可变形反射层。 可变形反射层包括沿第一方向延伸的多个大致平行的列。 每列具有一个或多个槽，其大致垂直于第一方向在第二方向上延伸。 可以在列的子部分的边界边缘处创建槽，以便部分地机械地分离子部分而不断开它们。 制造机电装置的方法包括在衬底上沉积导电的可变形反射层，去除可变形层的一个或多个部分以形成多个电隔离的柱，并且在至少一个 列。

公开(公告)号：WO2003000898A1

公开(公告)日：2003-01-03

申请号：PCT/IB2001/001105

申请日：2001-06-22

Applicant: SYNGENTA PARTICIPATIONS AG ,  CHANG, Hur-Song ,  CHEN, Wenqiong ,  COOPER, Bret ,  GLAZEBROOK, Jane ,  GOFF, Stephen, Arthur ,  HOU, Yu-Ming ,  KATAGIRI, Fumiaki ,  QUAN, Sheng ,  TAO, Yi ,  WHITHAM, Steve ,  XIE, Zhiyi ,  ZHU, Tong ,  ZOU, Guangzhou

Inventor： CHANG, Hur-Song ,  CHEN, Wenqiong ,  COOPER, Bret ,  GLAZEBROOK, Jane ,  GOFF, Stephen, Arthur ,  HOU, Yu-Ming ,  KATAGIRI, Fumiaki ,  QUAN, Sheng ,  TAO, Yi ,  WHITHAM, Steve ,  XIE, Zhiyi ,  ZHU, Tong ,  ZOU, Guangzhou

IPC: C12N15/29

CPC classification number: C12Q1/6895 ,  C07K14/415 ,  C12N15/8279 ,  C12Q2600/158

Abstract: Methods to identify genes, the expression of which are altered in response to pathogen infection, are provided, as well as the genes identified thereby and their corresponding promoters.

Abstract translation: 提供了识别基因，其表达被响应于病原体感染而改变的方法，以及由此鉴定的基因及其相应的启动子。

公开(公告)号：WO2013052297A1

公开(公告)日：2013-04-11

申请号：PCT/US2012/056927

申请日：2012-09-24

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  TAO, Yi ,  DJORDJEV, Konstadin ,  ZHONG, Fan

Inventor： TAO, Yi ,  DJORDJEV, Konstadin ,  ZHONG, Fan

IPC: G02B26/08 ,  G02B26/00

CPC classification number: G02B26/001

Abstract: Systems, methods and apparatus are provided for electromechanical systems devices having a non-uniform gap under a mechanical layer. An electromechanical system device includes a movable element supported at its edges over a substrate by at least two support structures. The movable element can be spaced from the substrate by a gap having two or more different heights in two or more corresponding distinct regions. The gap has a first height in a first region below the gap, such as an active area of the device, and a second height in a second region adjacent the support structure. In an interferometric modulator implementation, the second region can be encompassed within an anchor region with a black mask.

Abstract translation: 为在机械层下具有不均匀间隙的机电系统装置提供系统，方法和装置。 机电系统装置包括通过至少两个支撑结构在其衬底上的边缘处支撑的可移动元件。 可移动元件可以通过在两个或更多个相应的不同区域中具有两个或多个不同高度的间隙与基板间隔开。 间隙在间隙下方的第一区域中具有第一高度，例如装置的活动区域，以及与支撑结构相邻的第二区域中的第二高度。 在干涉式调制器实现中，第二区域可以包含在具有黑色掩模的锚定区域内。

公开(公告)号：WO2013036436A1

公开(公告)日：2013-03-14

申请号：PCT/US2012/053208

申请日：2012-08-30

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  PU, Chuan ,  TAO, Yi ,  TUPELLY, Chandra S. ,  DJORDJEV, Kostadin D. ,  ZHONG, Fan ,  HE, Rihui ,  ZHANG, Wenyue

Inventor： PU, Chuan ,  TAO, Yi ,  TUPELLY, Chandra S. ,  DJORDJEV, Kostadin D. ,  ZHONG, Fan ,  HE, Rihui ,  ZHANG, Wenyue

IPC: G02B26/00 ,  B81B3/00 ,  B81C1/00

CPC classification number: G02B26/001 ,  B81B3/0072 ,  B81B2201/042 ,  B81B2203/019 ,  B81C2201/0167 ,  B81C2201/017

Abstract: This disclosure provides systems, methods and apparatus for controlling a movable layer. In one aspect, an electromechanical systems device includes a substrate and a movable layer positioned over the substrate to define a gap. The movable layer is movable in the gap between an actuated position and a relaxed position, and includes a mirror layer, a cap layer, and a dielectric layer disposed between the mirror layer and the cap layer. The movable layer is configured to have a curvature in a direction away from the substrate when the movable layer is in the relaxed position. In some implementations, the movable layer can be formed to have a positive stress gradient directed toward the substrate that can direct the curvature of the movable layer upward when the sacrificial layer is removed.

Abstract translation: 本公开提供了用于控制可移动层的系统，方法和装置。 在一个方面，机电系统装置包括基板和位于基板上方以限定间隙的可移动层。 可移动层可以在致动位置和松弛位置之间的间隙中移动，并且包括镜层，盖层和设置在镜层和盖层之间的介电层。 可移动层被配置为当可移动层处于松弛位置时具有远离基底的方向的曲率。 在一些实施方案中，可移动层可以形成为具有朝向衬底的正应力梯度，当消除牺牲层时，可以将可移动层的曲率向上引导。

公开(公告)号：WO2012138577A1

公开(公告)日：2012-10-11

申请号：PCT/US2012/031643

申请日：2012-03-30

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  LEE, Hojin ,  ZHONG, Fan ,  TAO, Yi

Inventor： LEE, Hojin ,  ZHONG, Fan ,  TAO, Yi

IPC: G02B26/00 ,  G02B26/08

CPC classification number: G02B26/0841 ,  G02B26/001

Abstract: This disclosure provides systems, methods and apparatuses for pixel vias. In one aspect, a method of forming an electromechanical device having a plurality of pixels includes depositing an electrically conductive black mask (23) on a substrate (20) at each of four corners and along at least one edge region of each pixel, depositing a dielectric layer (35) over the black mask, depositing an optical stack (16) including a stationary electrode over the dielectric layer, and depositing a mechanical layer (14) over the optical stack. The method further includes providing a conductive via (138) in a first pixel of the plurality of pixels, the via disposed in the dielectric layer and electrically connecting the stationary electrode to the black mask, the via disposed in a position along an edge of the first pixel, spaced offset from the edge of the first pixel in a direction towards the center of the first pixel.

Abstract translation: 本公开提供了用于像素通孔的系统，方法和装置。 在一个方面，一种形成具有多个像素的机电装置的方法包括在四个拐角中的每一个并且沿着每个像素的至少一个边缘区域在基底（20）上沉积导电黑色掩模（23），将 电介质层（35），在所述电介质层上沉积包括固定电极的光学堆叠（16），并在所述光学堆叠上沉积机械层（14）。 所述方法还包括在所述多个像素的第一像素中提供导电通孔（138），所述通孔设置在所述电介质层中并将所述固定电极电连接到所述黑色掩模，所述通孔设置在沿着 第一像素，在朝向第一像素的中心的方向上与第一像素的边缘偏离。

公开(公告)号：WO2011084644A1

公开(公告)日：2011-07-14

申请号：PCT/US2010/060864

申请日：2010-12-16

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  TAO, Yi ,  ZHONG, Fan ,  TUNG, Yeh-jiun

Inventor： TAO, Yi ,  ZHONG, Fan ,  TUNG, Yeh-jiun

IPC: G02B26/00 ,  B81B3/00

CPC classification number: G02B26/001 ,  B81B3/007 ,  B81B2201/047

Abstract: Electromechanical modulators and methods of making the same are disclosed. In one embodiment, a display includes a sub-pixel having a membrane layer with a void formed therein. The void can be configured to increase the flexibility of the membrane layer. The sub-pixel can further include an optical mask configured to hide the void from a viewer. In another embodiment, a display can include at least two movable reflectors wherein each movable reflector has a different stiffness but each movable reflector has substantially the same effective coefficient of thermal expansion.

Abstract translation: 公开了机电调制器及其制造方法。 在一个实施例中，显示器包括具有其中形成有空隙的膜层的子像素。 空隙可以被配置成增加膜层的柔性。 子像素还可以包括被配置为从观察者隐藏空隙的光学掩模。 在另一个实施例中，显示器可以包括至少两个可移动反射器，其中每个可移动反射器具有不同的刚度，但每个可移动反射器具有基本上相同的有效热膨胀系数。