公开(公告)号：WO2004061162A1

公开(公告)日：2004-07-22

申请号：PCT/US2003/035398

申请日：2003-11-07

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： BOYD, Steven, D. ,  KESARI, Susrut ,  LAMANNA, William, M. ,  PARENT, Michael, J. ,  ZAZZERA, Lawrence, A. ,  ZHANG, Haiyan

IPC: C25D3/38

CPC classification number: C25D3/38 ,  C23C18/40

Abstract: The present invention provides plating solutions having either copper bis(perfluoroalkanesulfonyl) imides or copper tris(perfluoroalkanesulfonyl) methides and methods of electrochemically or chemically depositing copper interconnects using these plating solutions.

Abstract translation: 本发明提供了具有铜双（全氟烷基磺酰基）酰亚胺或三（全氟烷基磺酰基）磺酸铜的电镀溶液以及使用这些电镀溶液电化学或化学沉积铜互连的方法。

公开(公告)号：WO2002086872A1

公开(公告)日：2002-10-31

申请号：PCT/US2002/002901

申请日：2002-02-01

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： PARENT, Michael, J. ,  KEHREN, Jason, M. ,  MINDAY, Richard, M.

IPC: G11B5/71

CPC classification number: G11B5/71 ,  C10M107/38 ,  C10M169/041 ,  C10M2211/042 ,  C10M2211/0425 ,  C10M2211/063 ,  C10M2213/04 ,  C10M2213/06 ,  C10M2223/08 ,  C10N2240/204 ,  C10N2250/121 ,  G11B5/725

Abstract: A lubricant composition comprising a perfluoropolyether lubricant and fluorinated ketone solvent is described. The lubricant composition can be applied as a coating to a substrate such as magnetic media. After the coating dries, a thin uniform lubricant film covers the substrate surface. The fluorinated ketone solvent can solubilize a wide range of perfluoropolyether compounds but not potential contaminants such as water and hydrocarbons. Additionally, the solvent has low potential to adversely affect global warming.

Abstract translation: 描述了包含全氟聚醚润滑剂和氟化酮溶剂的润滑剂组合物。 润滑剂组合物可以作为涂层施加到诸如磁性介质的基底上。 涂层干燥后，薄的均匀润滑膜覆盖基材表面。 氟化酮溶剂可以溶解宽范围的全氟聚醚化合物，但不溶于潜在的污染物如水和烃。 此外，溶剂具有低的对全球变暖有不利影响的潜力。

公开(公告)号：WO2004061028A1

公开(公告)日：2004-07-22

申请号：PCT/US2003/034259

申请日：2003-10-28

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： KESARI, Susrut ,  LAMANNA, William, M. ,  PARENT, Michael, J. ,  ZAZZERA, Lawrence, A.

IPC: C09G1/02

CPC classification number: C11D3/349 ,  C09G1/02 ,  C11D11/0047 ,  C23F3/06 ,  C23G1/103 ,  H01L21/02074 ,  H01L21/32125

Abstract: The present invention provides methods of polishing and/or cleaning copper interconnections using bis (perfluoroalkanesulfonyl) imide acids or tris (perfluoroalkanesulfonyl) methide acids compositions.

Abstract translation: 本发明提供使用双（全氟烷基磺酰基）酰亚胺酸或三（全氟烷基磺酰基）甲基化物酸组合物抛光和/或清洗铜互连的方法。

公开(公告)号：WO2004061027A1

公开(公告)日：2004-07-22

申请号：PCT/US2003/033878

申请日：2003-10-24

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： ZAZZERA, Lawrence, A. ,  PARENT, Michael, J. ,  LAMANNA, William, M. ,  KESARI, Susrut

IPC: C09G1/02

CPC classification number: H01L21/32134 ,  C09G1/02 ,  C11D1/004 ,  C11D3/349 ,  C11D11/0047 ,  C23F3/06 ,  C23G1/103 ,  H01L21/02074 ,  H01L21/3212 ,  H01L21/32125

Abstract: The present invention provides methods of polishing and/or cleaning copper interconnects using sulfonic acid compositions.

Abstract translation: 本发明提供了使用磺酸组合物抛光和/或清洁铜互连的方法。

公开(公告)号：WO2010074877A1

公开(公告)日：2010-07-01

申请号：PCT/US2009/065839

申请日：2009-11-25

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： SAVU, Patricia, M. ,  CLARK, Philip, G. ,  PARENT, Michael, J. ,  KEHREN, Jason, M.

IPC: C11D1/00 ,  C11D1/83

CPC classification number: C11D1/004 ,  C11D1/65

Abstract: A method of making a composition comprises independently providing a first component comprising a first compound, and a second component comprising a second compound; and combining the first component and the second component, wherein: a) the first compound is represented by; and b) the second compound is represented by. R f represents a perfluoroalkyl group having from 1 to 12 carbon atoms. R 1 , R 2 , R 3 , and R 4 each independently represent H or an alkyl group having from 1 to 6 carbon atoms. R 5 represents H, an alkyl group having from 1 to 6 carbon atoms, or a hydroxyalkyl group having from 1 to 6 carbon atoms. R 6 and R 7 each independently represent an alkyl group having from 1 to 6 carbon atoms, or a hydroxyalkyl group having from 1 to 6 carbon atoms. Compositions preparable according to the method are also disclosed.

Abstract translation: 制备组合物的方法包括独立地提供包含第一化合物的第一组分和包含第二化合物的第二组分; 并且组合所述第一组分和所述第二组分，其中：a）所述第一化合物由下式表示： 和b）第二化合物表示。 Rf表示具有1至12个碳原子的全氟烷基。 R 1，R 2，R 3和R 4各自独立地表示H或具有1至6个碳原子的烷基。 R5表示H，具有1至6个碳原子的烷基或具有1至6个碳原子的羟烷基。 R6和R7各自独立地表示具有1至6个碳原子的烷基或具有1至6个碳原子的羟烷基。 还公开了根据该方法可制备的组合物。

公开(公告)号：WO2004044091A1

公开(公告)日：2004-05-27

申请号：PCT/US2003/028606

申请日：2003-09-11

Applicant: 3M INNOVATIVE PROPERTIES COMPANY

Inventor： PARENT, Michael, J. ,  SAVU, Patricia, M. ,  FLYNN, Richard, M.

IPC: C09K13/04

CPC classification number: H01L21/31111 ,  C09K13/08

Abstract: The present invention is directed to certain fluorinated surfactants, and use thereof in acid etch solutions, such as in aqueous buffered acid etch solutions. The etch solutions are used with a wide variety of substrates, for example, in the etching of silicon oxide-containing substrates.

Abstract translation: 本发明涉及某些氟化表面活性剂及其在酸蚀刻溶液中的用途，例如在含水缓冲酸蚀刻溶液中。 蚀刻溶液与各种各样的衬底一起使用，例如，在含氧化硅的衬底的蚀刻中。