公开(公告)号：WO03035927A3

公开(公告)日：2003-07-31

申请号：PCT/US0234553

申请日：2002-10-25

Applicant: APPLIED MATERIALS INC

Inventor： CHEN LING ,  KU VINCENT ,  WU DIEN-YEH ,  CHUNG HUA ,  OUYE ALAN ,  NAKASHIMA NORMAN ,  CHANG MEI

IPC: C23C16/44 ,  C23C16/455 ,  H01L21/205 ,  H01L21/28 ,  H01L21/285 ,  H01L21/768

CPC classification number: H01L21/76843 ,  C23C16/4411 ,  C23C16/45504 ,  C23C16/45508 ,  C23C16/45512 ,  C23C16/45544 ,  C23C16/45563 ,  C23C16/45582 ,  H01L21/28562

Abstract: An apparatus and method for performing a cyclical layer deposition process, such as atomic layer deposition is provided. In one aspect, the apparatus includes a substrate support having a substrate receiving surface, and a chamber lid comprising a tapered passageway extending from a central portion of the chamber lid and a bottom surface extending from the passageway to a peripheral portion of the chamber lid, the bottom surface shaped and sized to substantially cover the substrate receiving surface. The apparatus also includes one or more valves coupled to the gradually expanding channel, and one or more gas sources coupled to each valve.

Abstract translation: 提供了一种用于执行诸如原子层沉积的循环层沉积工艺的装置和方法。 一方面，该装置包括具有基板接收表面的基板支撑件和包括从腔室盖的中心部分延伸的锥形通道和从通道延伸到腔室盖的周边部分的底面的腔室盖， 所述底表面的形状和尺寸基本上覆盖所述基板接收表面。 该装置还包括联接到逐渐扩大的通道的一个或多个阀以及联接到每个阀的一个或多个气体源。

公开(公告)号：WO2007115000A3

公开(公告)日：2008-12-11

申请号：PCT/US2007064276

申请日：2007-03-19

Applicant: APPLIED MATERIALS INC ,  NAKASHIMA NORMAN ,  MARCADAL CHRISTOPHE ,  GANGULI SESHADRI ,  MA PAUL ,  CHU SCHUBERT S

Inventor： NAKASHIMA NORMAN ,  MARCADAL CHRISTOPHE ,  GANGULI SESHADRI ,  MA PAUL ,  CHU SCHUBERT S

IPC: F16K3/36 ,  F16K11/20

CPC classification number: C23C16/4481 ,  C23C16/4408 ,  C23C16/45561 ,  Y10T137/3127 ,  Y10T137/4259 ,  Y10T137/87249 ,  Y10T137/877

Abstract: An ampoule assembly is configured with a bypass line and valve to allow the purging of the lines and valves connected to the ampoule. The ampoule assembly, in one embodiment, includes an ampoule, an inlet line, an outlet line, and a bypass line connected between the inlet line and the outlet line, the bypass line having a shut-off valve disposed therein to fluidly couple or decouple the inlet line and the outlet line. The shut-off valve disposed in the bypass line may be remotely controllable. Also, additional remotely controllable shut-off valves may be provided in the inlet and the outlet lines.

Abstract translation: 安瓿组件配置有旁通管线和阀，以允许清洗连接到安瓿的管线和阀。 在一个实施例中，安瓿组件包括安瓿瓶，入口管线，出口管线和连接在入口管线和出口管线之间的旁通管线，旁通管线具有设置在其中的截止阀以流体耦合或解耦 入口管线和出口管路。 设置在旁路管路中的截止阀可以是远程控制的。 此外，可以在入口和出口管线中设置附加的可远程控制的截止阀。