公开(公告)号：WO2015018590A1

公开(公告)日：2015-02-12

申请号：PCT/EP2014/064728

申请日：2014-07-09

Applicant: ASML NETHERLANDS B.V.

Inventor： WUISTER, Sander ,  AMBESI, Davide ,  LAENENS, Bart

IPC: B81C1/00 ,  G03F7/00

CPC classification number: G03F1/70 ,  B81C1/00031 ,  B81C2201/0149 ,  G03F7/0002 ,  G06F17/5072 ,  G06F17/5081

Abstract: A method of design or verification for a self-assemblable block copolymer feature, the block copolymer feature including a first domain having a first polymer type and a second domain having a second polymer type, the method including, based on the length of the second polymer type or on an uncertainty in position of the first domain within the block copolymer feature calculated based on the length of the second polymer type, adjusting a parameter of the self-assembly process of a block copolymer feature or verifying a placement of a block copolymer feature.

Abstract translation: 一种用于可自组装嵌段共聚物特征的设计或验证方法，所述嵌段共聚物特征包括具有第一聚合物类型的第一结构域和具有第二聚合物类型的第二结构域，所述方法包括基于所述第二聚合物的长度 类型或基于第二聚合物类型的长度计算的嵌段共聚物特征中的第一结构域的不确定性，调节嵌段共聚物特征的自组装过程的参数或验证嵌段共聚物特征的放置 。

公开(公告)号：WO2018206199A1

公开(公告)日：2018-11-15

申请号：PCT/EP2018/058674

申请日：2018-04-05

Applicant: ASML NETHERLANDS B.V.

Inventor： TEL, Wim, Tjibbo ,  LAENENS, Bart

IPC: G03F7/20

CPC classification number: G03F7/70641 ,  G03F7/70625

Abstract: Methods and apparatus for determining a focus of a projection system are disclosed. In one arrangement, a method includes obtaining first data derived from a first measurement of one or more selected properties of a target pattern formed on a substrate by exposing the substrate using the projection system. The first measurement is performed before the substrate is etched based on the target pattern. The method further includes obtaining second data derived from a second measurement of the one or more selected properties of the target pattern. The second measurement is performed after the substrate is etched based on the target pattern. The method further comprises determining the focus of the projection system using the first data and the second data.

公开(公告)号：WO2017102336A1

公开(公告)日：2017-06-22

申请号：PCT/EP2016/079336

申请日：2016-11-30

Applicant: ASML NETHERLANDS B.V.

Inventor： CHEN, Jun ,  WALLOW, Thomas I. ,  LAENENS, Bart ,  PENG, Yi-Hsing

IPC: G03F7/20

CPC classification number: G03F7/70625 ,  G03F7/705

Abstract: A method including obtaining a plurality of gauges of a plurality of gauge patterns for a patterning process, each gauge pattern configured for measurement of a parameter of the patterning process when created as part of the patterning process, and creating a selection of one or more gauges from the plurality of gauges, wherein a gauge is included in the selection provided the gauge and all the other gauges, if any, of the same gauge pattern, or all of the one or more gauges of the same gauge pattern linked to the gauge, pass a gauge printability check.

Abstract translation: 一种方法，包括：获得用于图案化过程的多个规格图案的多个规格，每个规格图案被配置用于当作为图案化过程的一部分而被创建时测量该图案化过程的参数;以及 从所述多个计量器中创建一个或多个计量器的选择，其中如果存在所述计量器和所有其他计量器（如果有的话）的相同计量器模式或所有所述一个或多个计量器 与量规相连的相同量规图案，通过量规印刷适性检查。

公开(公告)号：WO2015032588A1

公开(公告)日：2015-03-12

申请号：PCT/EP2014/067086

申请日：2014-08-08

Applicant: ASML NETHERLANDS B.V.

Inventor： LAENENS, Bart ,  WUISTER, Sander, Frederik

IPC: G03F7/00

CPC classification number: G06F17/5081 ,  G03F1/36 ,  G03F7/0002 ,  G06F17/5009

Abstract: A method of determining a characteristic of a guiding template for guiding self-assembly of block copolymer to form an entirety of a design layout, or a portion thereof, including a plurality of design features, each design feature including one or more elemental features, the method including selecting a characteristic of a guiding template for each of the one or more elemental features of the plurality of design features from a database or a computer readable non-transitory medium, the database or the computer readable non-transitory medium storing a characteristic of a guiding template for each of the one or more elemental features, and determining the characteristic of the guiding template to form the entirety of the design layout, or the portion thereof, by combining the selected characteristic of the guiding template for the one or more elemental features for each of the plurality of design features.

Abstract translation: 一种确定引导模板的特征的方法，用于引导嵌段共聚物的自组装以形成包括多个设计特征的整个设计布局或其一部分，每个设计特征包括一个或多个元素特征， 方法，包括从数据库或计算机可读的非暂时介质中选择所述多个设计特征中的所述一个或多个元素特征中的每一个的指导模板的特征，所述数据库或所述计算机可读非暂时介质存储 用于所述一个或多个元素特征中的每一个的引导模板，以及通过组合用于所述一个或多个元素的所述引导模板的所选特征来确定所述引导模板的特征以形成所述设计布局的整体或其部分 用于多个设计特征中的每一个的特征。