公开(公告)号：WO2018228933A3

公开(公告)日：2018-12-20

申请号：PCT/EP2018/065127

申请日：2018-06-08

Applicant: ASML NETHERLANDS B.V.

Inventor： VLES, David, Ferdinand ,  ANDE, Chaitanya Krishna ,  DE GROOT, Antonius, Franciscus, Johannes ,  GIESBERS, Adrianus, Johannes, Maria ,  JANSSEN, Johannes, Joseph ,  JANSSEN, Paul ,  KLOOTWIJK, Johan, Hendrik ,  KNAPEN, Peter, Simon, Antonius ,  KURGANOVA, Evgenia ,  MEIJER, Marcel, Peter ,  MEIJERINK, Wouter, Rogier ,  NASALEVICH, Maxim, Aleksandrovich ,  NOTENBOOM, Arnoud, Willem ,  OLSMAN, Raymond ,  PATEL, Hrishikesh ,  PÉTER, Mária ,  VAN DEN BOSCH, Gerrit ,  VAN DEN EINDEN, Wilhelmus, Theodorus, Anthonius, Johannes ,  VAN DER ZANDE, Willem, Joan ,  VAN ZWOL, Pieter-Jan ,  VERMEULEN, Johannes, Petrus, Martinus, Bernardus ,  VOORTHUIJZEN, Willem-Pieter ,  WONDERGEM, Hendrikus, Jan ,  ZDRAVKOV, Alexandar, Nikolov

IPC: G03F1/62 ,  G03F1/64

Abstract: The invention relates to a pellicle assembly comprising a pellicle frame defining a surface onto which a pellicle is attached. The pellicle assembly comprises one or more three-dimensional expansion structures that allow the pellicle to expand under stress. The invention also relates to a pellicle assembly for a patterning device comprising one or more actuators for moving the pellicle assembly towards and way from the patterning device.

公开(公告)号：WO2018228933A2

公开(公告)日：2018-12-20

申请号：PCT/EP2018/065127

申请日：2018-06-08

Applicant: ASML NETHERLANDS B.V.

Inventor： VLES, David, Ferdinand ,  ANDE, Chaitanya Krishna ,  DE GROOT, Antonius, Franciscus, Johannes ,  GIESBERS, Adrianus, Johannes, Maria ,  JANSSEN, Johannes, Joseph ,  JANSSEN, Paul ,  KLOOTWIJK, Johan, Hendrik ,  KNAPEN, Peter, Simon, Antonius ,  KURGANOVA, Evgenia ,  MEIJER, Marcel, Peter ,  MEIJERINK, Wouter, Rogier ,  NASALEVICH, Maxim, Aleksandrovich ,  NOTENBOOM, Arnoud, Willem ,  OLSMAN, Raymond ,  PATEL, Hrishikesh ,  PÉTER, Mária ,  VAN DEN BOSCH, Gerrit ,  VAN DEN EINDEN, Wilhelmus, Theodorus, Anthonius, Johannes ,  VAN DER ZANDE, Willem, Joan ,  VAN ZWOL, Pieter-Jan ,  VERMEULEN, Johannes, Petrus, Martinus, Bernardus ,  VOORTHUIJZEN, Willem-Pieter ,  WONDERGEM, Hendrikus, Jan ,  ZDRAVKOV, Alexandar, Nikolov

IPC: G03F1/62 ,  G03F1/64

Abstract: The invention relates to a pellicle assembly comprising a pellicle frame defining a surface onto which a pellicle is attached. The pellicle assembly comprises one or more three-dimensional expansion structures that allow the pellicle to expand under stress. The invention also relates to a pellicle assembly for a patterning device comprising one or more actuators for moving the pellicle assembly towards and way from the patterning device.