公开(公告)号：WO2017112060A1

公开(公告)日：2017-06-29

申请号：PCT/US2016/057552

申请日：2016-10-18

Applicant: CYMER, LLC ,  ASML NETHERLANDS B.V.

Inventor： THORNES, Joshua, Jon ,  AGGARWAL, Tanuj ,  O'BRIEN, Kevin, Michael ,  EVERTS, Frank ,  GODFRIED, Herman, Phillip ,  BURDT, Russell, Allen

IPC: G01J1/42 ,  G01J3/28 ,  G03F7/20 ,  H01S3/13

CPC classification number: G01J11/00 ,  G01J1/0228 ,  G01J1/0448 ,  G01J1/4257 ,  G03F7/70041 ,  G03F7/70516 ,  G03F7/7055 ,  G03F7/70558 ,  G03F7/70575 ,  H01S3/0014 ,  H01S3/10046 ,  H01S3/10069

Abstract: Online calibration of laser performance as a function of the repetition rate at which the laser is operated is disclosed. The calibration can be periodic and carried out during a scheduled during a non-exposure period. Various criteria can be used to automatically select the repetition rates that result in reliable in-spec performance. The reliable values of repetition rates are then made available to the scanner as allowed values and the laser/scanner system is then permitted to use those allowed repetition rates.

Abstract translation: 公开了作为激光器工作重复频率的函数的在线校准激光器性能。 校准可以是周期性的，并且在非暴露期间的计划期间进行。 可以使用各种标准来自动选择导致可靠规格性能的重复率。 重复频率的可靠值然后被提供给扫描仪，因为允许的值和激光/扫描仪系统然后被允许使用那些允许的重复率。