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    REDUCED SCRUB CONTACT ELEMENT
    4.
    发明申请
    REDUCED SCRUB CONTACT ELEMENT 审中-公开

    公开(公告)号：WO2009042946A3

    公开(公告)日：2009-04-02

    申请号：PCT/US2008/077991

    申请日：2008-09-26

    Applicant: FORMFACTOR, INC. ,  GRITTERS, John K.

    Inventor： GRITTERS, John K.

    IPC: H01L21/66

    Abstract: Embodiments of resilient contact elements and methods for fabricating and using same are provided herein. In one embodiment, a resilient contact element includes a lithographically formed resilient beam having a plurality of openings disposed laterally therethrough; and a tip disposed proximate a first end of the beam, the tip and the beam together configured to electrically probe a device to be tested.

    RESILIENT CONTACT ELEMENT AND METHODS OF FABRICATION
    6.
    发明申请
    RESILIENT CONTACT ELEMENT AND METHODS OF FABRICATION 审中-公开
    灵活的接触元件和制造方法

    公开(公告)号：WO2008082815A2

    公开(公告)日：2008-07-10

    申请号：PCT/US2007/085481

    申请日：2007-11-25

    Applicant: FORMFACTOR, INC. ,  GRITTERS, John K. ,  ELDRIDGE, Benjamin, N. ,  BREINLINGER, Keith J.

    Inventor： GRITTERS, John K. ,  ELDRIDGE, Benjamin, N. ,  BREINLINGER, Keith J.

    IPC: G01R1/067 ,  G01R31/26

    CPC classification number: H01R31/02 ,  G01R1/06733 ,  G01R1/07342 ,  G01R3/00

    Abstract: Embodiments of resilient contact elements and methods for fabricating same are provided herein. In one embodiment, a resilient contact element for use in a probe card includes a lithographically formed resilient beam having a first end and an opposing second end; and a tip disposed proximate the first end of the beam and configured to break through an oxide layer of a surface of a device to be tested to establish a reliable electrical connection therewith; wherein at least a central portion of the beam has a continuous sloped profile defining, in a relaxed state, a height measured between the beam and a plane representing an upper surface of a device to be tested that is greater near the second end of the beam than near the first end of the beam.

    Abstract translation: 弹性接触元件的实施例及其制造方法在本文中提供。 在一个实施例中，用于探针卡的弹性接触元件包括光刻形成的弹性梁，其具有第一端和相对的第二端; 以及设置在所述梁的第一端附近并且被构造成突破待测试装置的表面的氧化物层以与其建立可靠的电连接的尖端; 其中所述梁的至少中心部分具有连续的倾斜轮廓，所述连续倾斜轮廓在松弛状态下限定在所述梁与表示待测试装置的上表面的平面之间测量的高度，其在所述梁的第二端附近较大 比梁的第一端附近。

    MAKING AND USING CARBON NANOTUBE PROBES
    7.
    发明申请
    MAKING AND USING CARBON NANOTUBE PROBES 审中-公开
    制备和使用碳纳米管探针

    公开(公告)号：WO2008048938A2

    公开(公告)日：2008-04-24

    申请号：PCT/US2007/081423

    申请日：2007-10-15

    Applicant: FORMFACTOR, INC. ,  ELDRIDGE, Benjamin N. ,  GRITTERS, John K. ,  MARTENS, Rodney I. ,  SLOCUM, Alexander H. ,  YAGLIOGLU, Onnik

    Inventor： ELDRIDGE, Benjamin N. ,  GRITTERS, John K. ,  MARTENS, Rodney I. ,  SLOCUM, Alexander H. ,  YAGLIOGLU, Onnik

    IPC: H01J61/04

    CPC classification number: G01R1/06716 ,  G01R1/06744 ,  G01R1/0675 ,  G01R1/06755 ,  G01R3/00 ,  H01L2924/0002 ,  Y10T29/49004 ,  Y10T29/49147 ,  Y10T29/49204 ,  H01L2924/00

    Abstract: Columns comprising a plurality of vertically aligned carbon nanotubes can be configured as electromechanical contact structures or probes. The columns can be grown on a sacrificial substrate and transferred to a product substrate, or the columns can be grown on the product substrate. The columns can be treated to enhance mechanical properties such as stiffness, electrical properties such as electrical conductivity, and/or physical contact characteristics. The columns can be mechanically tuned to have predetermined spring properties. The columns can be used as electromechanical probes, for example, to contact and test electronic devices such as semiconductor dies, and the columns can make unique marks on terminals of the electronic devices.

    Abstract translation: 包含多个垂直排列的碳纳米管的柱可以被配置为机电接触结构或探针。 柱子可以在牺牲基底上生长并转移到产品基底上，或者柱子可以在产品基底上生长。 可以对柱进行处理以增强机械性能，例如刚度，电性能（例如电导率）和/或物理接触特性。 可以机械地调整柱子以具有预定的弹簧特性。 这些色谱柱可以用作机电探头，例如用于接触和测试电子设备，例如半导体裸片，并且色谱柱可以在电子设备的端子上制作独特的标记。

    CONTACTOR HAVING A GLOBAL SPRING STRUCTURE AND METHODS OF MAKING AND USING THE CONTACTOR
    8.
    发明申请
    CONTACTOR HAVING A GLOBAL SPRING STRUCTURE AND METHODS OF MAKING AND USING THE CONTACTOR 审中-公开

    公开(公告)号：WO2007146584A3

    公开(公告)日：2007-12-21

    申请号：PCT/US2007/069812

    申请日：2007-05-25

    Applicant: FORMFACTOR, INC. ,  GRITTERS, John K.

    Inventor： GRITTERS, John K.

    IPC: G01R31/02

    Abstract: In some embodiments of the invention, a probing apparatus can comprise a substrate, a spring structure attached to the substrate, and a plurality of resilient probes attached to the spring structure. Each probe can comprise a contact portion disposed to contact a device. The spring structure can provide a first source of compliance for each of the probes in response to forces on the contact portions of the probes, and each of the probes can individually provide second sources of compliance in response to the forces on the contact portions of the probes.

    PROCESS FOR MANUFACTURING CONTACT ELEMENTS FOR PROBE CARD ASSEMBLIES
    10.
    发明申请
    PROCESS FOR MANUFACTURING CONTACT ELEMENTS FOR PROBE CARD ASSEMBLIES 审中-公开
    用于制造探针卡组件的接触元件的方法

    公开(公告)号：WO2010077482A1

    公开(公告)日：2010-07-08

    申请号：PCT/US2009/065424

    申请日：2009-11-21

    Applicant: FORMFACTOR, INC. ,  FAN, Li ,  GRITTERS, John K.

    Inventor： FAN, Li ,  GRITTERS, John K.

    IPC: H01L21/66

    CPC classification number: G01R3/00 ,  G01R1/06711 ,  H01L2924/0002 ,  Y10T29/49002 ,  H01L2924/00

    Abstract: A process for making contact elements for a probe card assembly includes steps of forming a first continuous trench in a substrate along a first direction, and forming simultaneously a plurality of tip structures adjacent one to another in the first continuous trench in a second direction substantially normal to the first direction, each of the tip structures being part of, or adapted to be part of at least one corresponding contact element capable of forming an electrical contact with a terminal of an electronic device.

    Abstract translation: 用于制造探针卡组件的接触元件的方法包括以下步骤：沿着第一方向在衬底中形成第一连续沟槽，同时在第一连续沟槽中沿第二方向同时形成多个尖端结构 到第一方向，每个尖端结构是能够形成与电子设备的端子的电接触的至少一个对应的接触元件的一部分或者适于其中的一部分。

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