公开(公告)号：WO2015106318A1

公开(公告)日：2015-07-23

申请号：PCT/AU2015/050013

申请日：2015-01-15

Applicant: GALLIUM ENTERPRISES PTY LTD

Inventor： MANN, Ian ,  BARIK, Satyanarayan ,  WINTREBERT-FOUQUET, Marie ,  BROWN, Josh ,  DUNNIGAN, Paul

IPC: H05H1/46 ,  C23C16/34 ,  C23C16/00

CPC classification number: C23C16/50 ,  C23C16/34 ,  C23C16/509 ,  H01J37/321 ,  H01J37/32357 ,  H01J37/32477 ,  H01J37/32486 ,  H01J2237/3321

Abstract: A plasma generator is described which employs a partial PBN liner not only to minimise the loss of energetic gas species during film formation but also to reduce boron impurity levels introduced into the growing film relative to the use of a complete PBN liner. The use of such a plasma generator in a film forming apparatus and method of forming a film is also described.

Abstract translation: 描述了一种使用部分PBN衬垫的等离子体发生器，其不仅使成膜期间能量气体种类的损失最小化，而且还减少了相对于使用完整的PBN衬垫引入生长膜的硼杂质水平。 还描述了在成膜装置中使用这种等离子体发生器和形成膜的方法。