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公开(公告)号：WO2018031560A1
公开(公告)日：2018-02-15
申请号：PCT/US2017/045929
申请日：2017-08-08
CPC分类号： G02B21/0028 , G02B21/0016 , G02B21/008 , G02B21/367 , G06T7/0004 , G06T7/571 , G06T2207/10016 , G06T2207/10056 , G06T2207/10148 , G06T2207/30148
摘要： A method of generating 3D information of a sample using an optical microscope includes: varying the distance between the sample and an objective lens of the optical microscope at predetermined steps, capturing an image at each predetermined step. In one example, the method further includes: determining a characteristic of each pixel in each captured image; determining, for each captured image, the greatest characteristic across all pixels in the captured image; and comparing the greatest characteristic for each captured image to determine if a surface of the sample is present at each step. In another example, the method further includes: determining a characteristic of each pixel in each captured image; determining, for each captured image, a count of pixels that have a characteristic value within a first range; and determining if a surface of the sample is present at each step based on the count of pixels for each captured image.
摘要翻译： 使用光学显微镜产生样品的3D信息的方法包括：以预定步骤改变样品与光学显微镜的物镜之间的距离，在每个预定步骤捕获图像。 在一个示例中，该方法还包括：确定每个捕获图像中的每个像素的特性; 针对每个捕获的图像确定捕获的图像中的所有像素上的最大特性; 并比较每个捕获图像的最大特征以确定样本的表面是否存在于每个步骤。 在另一个示例中，该方法还包括：确定每个捕获的图像中的每个像素的特性; 针对每个捕获的图像确定具有在第一范围内的特征值的像素的计数; 并根据每个捕捉图像的像素数来确定每个步骤中是否存在样本的表面。
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公开(公告)号：WO2018031639A1
公开(公告)日：2018-02-15
申请号：PCT/US2017/046076
申请日：2017-08-09
CPC分类号： G06T7/0004 , G01B11/02 , G01B11/12 , G01B11/24 , G01B11/2441 , G01B11/25 , G01B2210/56 , G01N21/8851 , G01N21/9505 , G01N2021/8887 , G02B21/244 , G02B21/367 , G06T7/62 , G06T2207/10016 , G06T2207/10024 , G06T2207/10056 , G06T2207/30148
摘要： A method of generating 3D information of a sample using an optical microscope includes: varying the distance between the sample and an objective lens of the optical microscope at pre-determined steps, capturing an image at each pre-determined step, determining a characteristic value of each pixel in each captured image, determining a first captured image that is focused on a first surface of the sample based on the characteristic value of each pixel in each captured image, and determining a measurement of an opening in the first surface of the sample based on the first captured image. The first surface of the sample and the second surface of the sample are within a field of view of each of the captured images. The first captured image includes a pattern overlay. In another example, the opening measurement is determined using a second captured image without a pattern overlay.
摘要翻译： 使用光学显微镜产生样本的3D信息的方法包括：以预定步骤改变样本与光学显微镜的物镜之间的距离，在每个预定步骤捕获图像， 确定每个捕获图像中的每个像素的特征值;基于每个捕获图像中的每个像素的特征值确定聚焦在样本的第一表面上的第一捕获图像;以及确定开口的测量值 在基于第一捕获图像的样本的第一表面中。 样品的第一表面和样品的第二表面在每个捕获图像的视野内。 第一个捕捉的图像包括一个图案覆盖。 在另一个示例中，使用没有图案叠加的第二捕获图像来确定开放测量。
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公开(公告)号：WO2018031574A1
公开(公告)日：2018-02-15
申请号：PCT/US2017/045950
申请日：2017-08-08
CPC分类号： G01B9/04 , G01B11/0608 , G01B11/22 , G01B11/24 , G01B11/2441 , G01B11/25 , G01B2210/56 , G01N21/956 , G02B21/0016 , G02B21/367 , G06T7/571 , G06T2207/10056 , G06T2207/30148
摘要： A method of generating 3D information including: varying the distance between the sample and an objective lens of the optical microscope at pre-determined steps; capturing an image at each pre-determined step; determining a characteristic value of each pixel in each captured image; determining, for each captured image, the greatest characteristic value across a first portion of pixels in the captured image; comparing the greatest characteristic value for each captured image to determine if a surface of the sample is present at each pre-determined step; determining a first captured image that is focused on an apex of a bump of the sample; determining a second captured image that is focused on a first surface of the sample based on the characteristic value of each pixel in each captured image; and determining a first distance between the apex of the bump and the first surface.
摘要翻译： 一种产生3D信息的方法，包括：以预定步骤改变样品与光学显微镜的物镜之间的距离; 在每个预定步骤捕获图像; 确定每个捕获图像中每个像素的特征值; 针对每个捕捉的图像确定捕捉的图像中的像素的第一部分上的最大特征值; 比较每个捕获图像的最大特征值，以确定样本的表面是否存在于每个预定步骤; 确定聚焦在样本的凸块的顶点上的第一捕获图像; 基于每个捕获的图像中的每个像素的特征值来确定聚焦在样本的第一表面上的第二捕获图像; 并确定凸块的顶点与第一表面之间的第一距离。
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公开(公告)号：WO2018031567A1
公开(公告)日：2018-02-15
申请号：PCT/US2017/045938
申请日：2017-08-08
CPC分类号： G02B21/244 , G02B21/0016 , G02B21/26 , G02B21/367 , G06T7/0006 , G06T7/571 , G06T2207/10028 , G06T2207/10056 , G06T2207/10148 , G06T2207/30148
摘要： A method of generating 3D information includes: varying the distance between the sample and an objective lens of the optical microscope at pre-determined steps, capturing an image at each pre-determined step; determining a characteristic value of each pixel in each captured image; determining, for each captured image, the greatest characteristic value across all pixels in the captured image; comparing the greatest characteristic value for each captured image to determine if a surface of the sample is present at each pre-determined step; determining a first captured image that is focused on a first surface of the sample based on the characteristic value of each pixel in each captured image; determining a second captured image that is focused on a second surface of the sample based on the characteristic value of each pixel in each captured image; and determining a first distance between the first surface and the second surface.
摘要翻译： 生成3D信息的方法包括：以预定步骤改变样本与光学显微镜的物镜之间的距离，在每个预定步骤捕获图像; 确定每个捕获图像中每个像素的特征值; 针对每个捕获的图像确定所捕获的图像中的所有像素上的最大特征值; 比较每个捕获图像的最大特征值，以确定样本的表面是否存在于每个预定步骤; 基于每个捕获图像中的每个像素的特征值确定聚焦在样本的第一表面上的第一捕获图像; 基于每个捕获图像中的每个像素的特征值确定聚焦在样本的第二表面上的第二捕获图像; 并确定第一表面和第二表面之间的第一距离。
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