公开(公告)号：WO2015195387A1

公开(公告)日：2015-12-23

申请号：PCT/US2015/034635

申请日：2015-06-08

Applicant: NUVOSUN, INC.

Inventor： CLOVER, Preston ,  HACHTMANN, Bruce, D. ,  PENG, Grant ,  WALL, Arthur, C.

IPC: C23C18/02 ,  C23C18/12 ,  H01L31/20

CPC classification number: C23C18/02 ,  C23C18/1208 ,  C23C18/1291 ,  H01L31/022466 ,  H01L31/03928 ,  H01L31/0445 ,  H01L31/0749 ,  H01L31/18 ,  H01L31/1836 ,  H01L31/1864 ,  Y02E10/541

Abstract: Disclosed are methods and systems for forming a layer on a web with reduced levels of particulates. The layer is formed from a fluid mixture(s) or solution of chemical reagents that react to form the layer. The system includes a conveyor device provided configured to carry the web within the chamber while the first surface of the web undergoes one or more processing steps; a first fluid delivery apparatus and a second fluid delivery apparatus, and a first fluid removal apparatus. The first fluid removal apparatus is positioned within a space arranged between the first and the second delivery apparatuses.

Abstract translation: 公开了用于在具有降低的颗粒水平的网上形成层的方法和系统。 该层由反应形成层的流体混合物或化学试剂的溶液形成。 该系统包括传送装置，该传送装置被配置为在纤维网的第一表面经历一个或多个处理步骤的同时将纸幅运送在室内; 第一流体输送装置和第二流体输送装置，以及第一流体移除装置。 第一流体去除装置位于布置在第一和第二输送装置之间的空间内。

公开(公告)号：WO2016153941A1

公开(公告)日：2016-09-29

申请号：PCT/US2016/022989

申请日：2016-03-17

Applicant: NUVOSUN, INC.

Inventor： HACHTMANN, Bruce, D. ,  PORTER, Karing, Ross Baron ,  QUITUGUA-FLORES, Aaron, A. ,  WALL, Arthur, C.

IPC: C23C14/24 ,  C23C14/56

CPC classification number: C23C14/243 ,  C23C14/0623 ,  C23C14/24 ,  C23C14/541 ,  C23C14/542 ,  C23C14/562 ,  C23C14/566 ,  H01L31/02167 ,  H01L31/03923

Abstract: An example apparatus for depositing a predetermined amount of a material onto a substrate includes a container having a cavity configured to contain the material. The container and the cavity are elongated along a first axis of the container. The apparatus further includes one or more heaters that are (i) elongated along the first axis and (ii) configured to heat and evaporate the material by heating the container. The apparatus further includes a conveyor for moving the substrate in a direction substantially perpendicular to the first axis of the container and one or more openings in the container distributed along the first axis. The one or more openings provide fluid communication between a region external to the container and the cavity. A process for depositing the predetermined amount of the material onto the substrate is also disclosed herein.

Abstract translation: 用于将预定量的材料沉积到衬底上的示例性装置包括具有构造成容纳该材料的空腔的容器。 容器和空腔沿容器的第一轴线伸长。 所述装置还包括一个或多个加热器，所述加热器（i）沿着所述第一轴线延伸并且（ii）构造成通过加热所述容器来加热和蒸发所述材料。 该装置还包括一个输送机，用于沿着基本上垂直于容器的第一轴线的方向移动基板，以及沿着第一轴线分布的容器中的一个或多个开口。 一个或多个开口在容器外部的区域和空腔之间提供流体连通。 本文还公开了将预定量的材料沉积到基底上的工艺。

公开(公告)号：WO2015095648A1

公开(公告)日：2015-06-25

申请号：PCT/US2014/071384

申请日：2014-12-19

Applicant: NUVOSUN, INC.

Inventor： HACHTMANN, Bruce ,  CLOVER, Preston ,  HOLLARS, Dennis ,  WALL, Arthur, C. ,  TAYLOR, Rocky ,  PENG, Gang, Grant

IPC: C23C18/12 ,  H01L31/0392 ,  H01L31/18

CPC classification number: H01L31/1876 ,  B05C5/007 ,  B05C11/026 ,  B05C11/1039 ,  C23C18/1204 ,  C23C18/125 ,  H01L31/03925 ,  H01L31/03926 ,  H01L31/1836 ,  H01L31/1884 ,  Y02E10/50

Abstract: Methods and systems for forming a layer from a fluid mixture on a web are provided. The system includes a fluid delivery apparatus for delivering the fluid mixture onto the web. The fluid delivery apparatus includes a cascade device and a chemical dispenser device. The system also includes a fluid stirring apparatus comprising at least one fan positioned over the web and configured to generate a flow pattern that stirs the fluid mixture on the web while the layer is being formed, without the at least one fan contacting the fluid mixture. The system further includes a fluid removal apparatus having a rinsing device and a suction device. The rinsing device is configured to dispense a rinsing fluid onto the web. The suction device is configured to remove by suction the rinsing fluid and a remaining portion of the fluid mixture remaining on the web after formation of the layer.

Abstract translation: 提供了用于从网上的流体混合物形成层的方法和系统。 该系统包括用于将流体混合物输送到卷材上的流体输送装置。 流体输送装置包括级联装置和化学分配装置。 该系统还包括流体搅拌装置，其包括至少一个风扇，该风扇定位在纸幅上并且被配置为产生流动图案，其在形成该层的同时搅拌幅材上的流体混合物，而至少一个风扇不接触流体混合物。 该系统还包括具有漂洗装置和抽吸装置的流体清除装置。 冲洗装置被配置为将清洗流体分配到网上。 抽吸装置构造成在形成层之后通过抽吸去除冲洗流体和剩余部分流体混合物。

公开(公告)号：WO2016007326A1

公开(公告)日：2016-01-14

申请号：PCT/US2015/038496

申请日：2015-06-30

Applicant: NUVOSUN, INC.

Inventor： WALL, Arthur, C. ,  PAULSON, Puthur ,  PERSON, Donald ,  HOLLARS, Dennis ,  HACHTMANN, Bruce, D.

IPC: H01L31/0392 ,  H01L31/0445

CPC classification number: H01L31/03928 ,  C23C14/16 ,  C23C14/5866 ,  C23C16/06 ,  C23C16/56 ,  H01L21/02425 ,  H01L21/02568 ,  H01L21/02614 ,  H01L31/0445 ,  Y02E10/541 ,  Y02P70/521

Abstract: Example apparatus provide a conductive back contact layer and methods for making the same. An example method may include (a) providing a conductive substrate having a first side and a second side, (b) applying at least one pre-reaction layer to the second side of the substrate, wherein the pre-reaction layer comprises a conductive material, (c) exposing the at least one pre-reaction layer to a selenium-or sulfur-containing vapor, and (d) applying at least one layer of conductive oxidation-resistant material to the second side.

Abstract translation: 示例性装置提供导电性背接触层及其制造方法。 示例性方法可以包括（a）提供具有第一侧和第二侧的导电基底，（b）将至少一个预反应层施加到基底的第二侧，其中预反应层包含导电材料 ，（c）将至少一个预反应层暴露于含硒或含硫蒸汽，和（d）向第二面施加至少一层导电抗氧化材料。

公开(公告)号：WO2015073156A1

公开(公告)日：2015-05-21

申请号：PCT/US2014/060832

申请日：2014-10-16

Applicant: NUVOSUN, INC.

Inventor： WALL, Arthur, C. ,  KAO, Sam ,  KIM, John, Kwangyong ,  HACHTMANN, Bruce, D. ,  JIANG, Qiongzhong ,  PORTER, Karnig Ross, Baron

IPC: C23C14/24 ,  C23C14/54 ,  C23C14/06

CPC classification number: C23C14/546 ,  C23C14/0623 ,  C23C14/243 ,  C23C14/543

Abstract: Methods and systems are disclosed for monitoring vapor in a vacuum reactor apparatus. An system has (a) a vacuum chamber, (b) a vapor source housed in the vacuum chamber, wherein the vapor source is configured to generate a vapor, (c) a reaction vessel housed in the vacuum chamber and coupled to the vapor source, where the reaction vessel has an outlet to the vacuum chamber, and where the reaction vessel is configured to receive the vapor from the vapor source and to emit a portion of the received vapor into the vacuum chamber through the outlet, and (d) one or more sensors housed in the vacuum chamber, where the one or more sensors are configured to detect the vapor emitted through the outlet.

Abstract translation: 公开了用于监测真空反应器装置中的蒸气的方法和系统。 一种系统具有（a）真空室，（b）容纳在真空室中的蒸气源，其中蒸汽源被配置成产生蒸气，（c）容纳在真空室中的反应容器，并与蒸气源 ，其中反应容器具有到真空室的出口，并且其中反应容器构造成从蒸汽源接收蒸气并且通过出口将一部分接收的蒸气排放到真空室中，并且（d）一个 或更多的传感器，其中所述一个或多个传感器被配置为检测通过所述出口排出的蒸汽。

公开(公告)号：WO2015195388A1

公开(公告)日：2015-12-23

申请号：PCT/US2015/034639

申请日：2015-06-08

Applicant: NUVOSUN, INC.

Inventor： WALL, Arthur, C. ,  KIM, John, K. ,  BYKOV, Eugene ,  KAO, Sam ,  JIANG, Qiongzhong ,  HACHTMANN, Bruce, D.

IPC: C23C8/08 ,  C23C8/02 ,  H01L31/18 ,  H01L31/20

CPC classification number: C23C16/545 ,  C23C8/02 ,  C23C8/08 ,  C23C16/305 ,  C23C16/4485 ,  C23C16/46 ,  C23C16/52 ,  H01L21/02425 ,  H01L21/02491 ,  H01L21/02568 ,  H01L21/02587 ,  H01L21/02614 ,  H01L31/0322 ,  H01L31/03928 ,  Y02E10/541

Abstract: Methods and systems are disclosed for processing a precursor material. The method includes introducing a substrate having a precursor material deposited on a surface of the substrate into a first zone of a vacuum chamber. The precursor material comprises copper, indium, and at least one of gallium, selenium, sulfur, sodium, antimony, boron, aluminum, and silver. The method further includes, within the first zone, heating the precursor material to a target reaction temperature within a range of about 270° C to about 490° C. The method further includes maintaining a selenium vapor in a second zone of the vacuum chamber, and after heating the precursor material to the target reaction temperature, introducing the precursor material and the substrate to the second zone of the vacuum chamber.

Abstract translation: 公开了用于处理前体材料的方法和系统。 该方法包括将具有沉积在基板的表面上的前体材料的基板引入真空室的第一区域。 前体材料包括铜，铟，以及镓，硒，硫，钠，锑，硼，铝和银中的至少一种。 该方法还包括在第一区域内将前体材料加热到约270℃至约490℃的范围内的目标反应温度。该方法还包括将硒蒸汽保持在真空室的第二区域中， 并且在将前体材料加热到目标反应温度之后，将前体材料和基底引入真空室的第二区域。

公开(公告)号：WO2015095674A1

公开(公告)日：2015-06-25

申请号：PCT/US2014/071442

申请日：2014-12-19

Applicant: NUVOSUN, INC.

Inventor： HACHTMANN, Bruce ,  CLOVER, Preston ,  HOLLARS, Dennis ,  WALL, Arthur, C. ,  TAYLOR, Rocky ,  PENG, Gang, Grant

IPC: B65H20/06 ,  C23C16/509 ,  C23C16/54 ,  H01L31/0392 ,  H01L31/20

CPC classification number: C23C2/24 ,  B65H20/06 ,  B65H2301/51214 ,  B65H2301/5162 ,  B65H2401/213 ,  B65H2404/20 ,  B65H2404/694 ,  B65H2515/71 ,  B65H2701/1121 ,  B65H2801/87 ,  C23C18/02 ,  C23C18/1204 ,  H01L31/0392 ,  H01L31/03923 ,  H01L31/206 ,  Y02E10/541 ,  Y02P70/521

Abstract: Disclosed are methods and systems for processing a web. The web (402) has a first surface, a second surface opposite the first surface, and includes a magnetic material. An example system includes a processing bed (202) configured to support the web while the first surface of the web undergoes one or more processing steps. The system also includes magnets (300) positioned relative to the processing bed so as to exert a magnetic force on the web that pulls the center of the web (403) toward the processing bed. The system further includes a conveyor belt (404) configured to move the web over the processing bed (202). The conveyor belt (404) has a first contact surface and a second contact surface opposite the first contact surface. The first contact surface is configured to contact the second surface of the web, and the second contact surface is configured to contact the processing bed.

Abstract translation: 公开了用于处理网络的方法和系统。 网（402）具有第一表面，与第一表面相对的第二表面，并且包括磁性材料。 示例性系统包括被配置为在纤维网的第一表面经历一个或多个处理步骤时支撑幅材的处理床（202）。 该系统还包括相对于处理床定位的磁体（300），以便对卷筒纸（403）的中心向处理床施加磁力。 所述系统还包括被配置为将所述幅材移动到所述处理床（202）上的传送带（404）。 传送带（404）具有与第一接触表面相对的第一接触表面和第二接触表面。 第一接触表面构造成接触幅材的第二表面，并且第二接触表面构造成接触处理床。