公开(公告)号：WO2016037343A1

公开(公告)日：2016-03-17

申请号：PCT/CN2014/086359

申请日：2014-09-12

Applicant: SCHOTT GLASS TECHNOLOGIES (SUZHOU) CO. LTD.

Inventor： DA, Ning ,  HE, Feng ,  QIAN, Pengxiang

IPC: C03C15/02

CPC classification number: C03C21/002 ,  B65H18/28 ,  B65H2801/61 ,  C03C3/091 ,  C03C3/093 ,  C03C4/18 ,  C03C15/02 ,  C03C23/0025 ,  C03C2204/00

Abstract: A method for producing an ultrathin chemically toughened glass article, comprising providing an ultrathin glass sheet with a first surface and a second surface joined by at least one edge, having a thickness between the first and the second surface, chemically toughening the ultrathin glass sheet to produce an ultrathin toughened glass article. The method is characterized in that an edge pre-treatment is applied to the at least one edge, preferably all edges, of the ultrathin glass sheet prior to the chemical toughening in order to reduce and/or blunt edge defects and to increase resistance to breakage of the ultrathin glass sheet during the chemical toughening. Provided further is an ultrathin chemically toughened glass article and an ultrathin glass sheet as semi-finished product for the production of an ultrathin chemically toughened glass article.

Abstract translation: 一种超薄化学钢化玻璃制品的制造方法，其特征在于，提供具有第一表面和第二表面的超薄玻璃板，所述第一表面和第二表面通过至少一个边缘连接，所述第二表面具有在所述第一和第二表面之间的厚度，将所述超薄玻璃板化学增韧 生产超薄钢化玻璃制品。 该方法的特征在于，在化学增韧之前，将边缘预处理施加到超薄玻璃板的至少一个边缘，优选所有边缘，以减少和/或钝化边缘缺陷并增加抗断裂性 的化学增韧期间的超薄玻璃板。 还提供了一种超薄化学钢化玻璃制品和用于生产超薄化学钢化玻璃制品的半成品的超薄玻璃板。

公开(公告)号：WO2017132837A1

公开(公告)日：2017-08-10

申请号：PCT/CN2016/073212

申请日：2016-02-02

Applicant: SCHOTT GLASS TECHNOLOGIES (SUZHOU) CO. LTD.

Inventor： QIAN, Pengxiang ,  HOU, Yunfei ,  XUE, Junming ,  LIEBALD, Rainer ,  KUROKI, Hiroshi

IPC: C03C4/02

CPC classification number: C03C27/00 ,  C03C3/091 ,  C03C4/00

Abstract: The invention concerns a low CTE boro-aluminosilicate glass having a low brittleness, in particular for the use in wafer-level-packaging (WLP) applications, with a composition in Mol-％of SiO 2 : 60-85, Al 2 O 3 : 1-17, B 2 O 3 : 8-20, Na 2 O: 0-5, K 2 O: 0-5, MgO: 0-10, CaO: 0-10, SrO: 0-10, BaO: 0-10, wherein the average number of non-bridging oxygen per polyhedron (NBO) is equal or larger than -0.2 and a ratio B 2 O 3 /Al 2 O 3 is equal or larger than 0.5, wherein the NBO is defined as NBO ＝ 2 x O mol / (Si mol +Al mol +B mol ) –4. The invention also concerns a glass carrier wafer made from the low CTE boro-aluminosilicate glass and a use thereof as glass carrier wafer for the processing of a silicon substrate. The invention further concerns a method for providing a low CTE boro-aluminosilicate glass.

Abstract translation: 本发明涉及具有低脆性的低CTE硼铝硅酸盐玻璃，特别是用于晶片级封装（WLP）应用中的组合物，其组成为SiO 2摩尔％ > 2：60-85，Al 2 O 3：1-17，B 2 O 3： 8-20，Na 2 O：0-5，K 2 O：0-5，MgO：0-10，CaO：0-10，SrO ：0-10，BaO：0-10，其中每个多面体的非桥连氧的平均数（NBO）等于或大于-0.2并且比率B 2≤0.3， / sub> 2 _{3 等于或大于0.5，其中NBO定义为NBO = 2×0mol％/（ Si摩尔+ Al摩尔+ B摩尔）-4。 本发明还涉及由低CTE硼铝硅酸盐玻璃制成的玻璃载体晶片及其用作用于处理硅衬底的玻璃载体晶片的用途。 本发明还涉及提供低CTE硼铝硅酸盐玻璃的方法。}

公开(公告)号：WO2016037589A1

公开(公告)日：2016-03-17

申请号：PCT/CN2015/089411

申请日：2015-09-11

Applicant: SCHOTT GLASS TECHNOLOGIES (SUZHOU) CO. LTD.

Inventor： DA, Ning ,  HE, Feng ,  QIAN, Pengxiang

IPC: C03C15/02 ,  C03B27/03

CPC classification number: C03C21/002 ,  B65H18/28 ,  B65H2801/61 ,  C03C3/091 ,  C03C3/093 ,  C03C4/18 ,  C03C15/02 ,  C03C23/0025 ,  C03C2204/00

Abstract: A method for producing an ultrathin chemically toughened glass article comprises providing an ultrathin glass sheet with a first surface and a second surface joined by at least one edge, having a thickness between the first and the second surface, chemically toughening the ultrathin glass sheet to produce an ultrathin toughened glass article. The method is characterized in that an edge pre-treatment is applied to the at least one edge, preferably all edges, of the ultrathin glass sheet prior to the chemical toughening in order to reduce and/or blunt edge defects and to increase resistance to breakage of the ultrathin glass sheet during the chemical toughening. Provided further is an ultrathin chemically toughened glass article and an ultrathin glass sheet as semi-finished product for the production of an ultrathin chemically toughened glass article.

Abstract translation: 制造超薄化学钢化玻璃制品的方法包括提供具有第一表面和第二表面的超薄玻璃板，所述第一表面和第二表面通过至少一个边缘连接，具有在第一和第二表面之间的厚度，化学增韧超薄玻璃板以产生 超薄钢化玻璃制品。 该方法的特征在于，在化学增韧之前，将边缘预处理施加到超薄玻璃板的至少一个边缘，优选所有边缘，以便减少和/或钝化边缘缺陷并增加抗断裂性 的超薄玻璃板在化学增韧期间。 还提供了一种超薄化学钢化玻璃制品和用于生产超薄化学钢化玻璃制品的半成品的超薄玻璃板。

公开(公告)号：WO2021163818A1

公开(公告)日：2021-08-26

申请号：PCT/CN2020/000037

申请日：2020-02-21

Applicant: SCHOTT GLASS TECHNOLOGIES (SUZHOU) CO. LTD. ,  SCHOTT AG

Inventor： QIAN, Pengxiang ,  WANG, Chong ,  XUE, Junming ,  WINTERSTELLER, Fritz ,  RUDIGIER-VOIGT, Eveline

IPC: A47G21/18

Abstract: Drinking implements are made of glass with antimicrobial function of high durability, as well as methods for producing the same, as well as to uses of the drinking implement. The antimicrobial function of that dinking implement is facilitated by metal ions, especially Ag +, Cu +, Cu 2+, Zn 2+, Sn 2+, Ti 4+ and combinations thereof, which are applied as a durable layer to the drinking implement.

公开(公告)号：WO2021000222A1

公开(公告)日：2021-01-07

申请号：PCT/CN2019/094209

申请日：2019-07-01

Applicant: SCHOTT GLASS TECHNOLOGIES (SUZHOU) CO. LTD.

Inventor： SHAN, Yanquan ,  ZHANG, Guangjun ,  QIAN, Pengxiang ,  WIEGEL, Thomas

IPC: G02B5/18 ,  G03F7/20

Abstract: A diffractive optical element comprising at least two layers with different etching speeds for dry etching process. The diffractive optical element comprises a substrate of glass (12) and a microstructure layer (10) arranged on the substrate of glass (12). The ratio of dry etching speed in thickness direction of the substrate of glass (12) to that of the microstructure layer (10) is no more than 1: 2, preferably no more than 1: 5, more preferably no more than 1: 10 or most preferably no more than 1: 20, so that the substrate functions as an etching stop layer. The ratio of dry etching speed in horizontal direction of the substrate of glass (12) is substantial equal to that of the microstructure layer (10). The composition of glass (12) includes but not limited to Al 2 O 3 , alkaline material (M 2 O) and alkaline earth material (MO). And the weight percentage of Al 2 O 3 +M 2 O+MO>=5%. The height of the microstructure can be controlled with a high precision.

公开(公告)号：WO2016149860A1

公开(公告)日：2016-09-29

申请号：PCT/CN2015/074681

申请日：2015-03-20

Applicant: SCHOTT GLASS TECHNOLOGIES (SUZHOU) CO. LTD.

Inventor： LUO, Xiaodong ,  WANG, Chong ,  QIAN, Pengxiang ,  HE, Feng ,  HUANG, Aiming ,  HOU, Dengke ,  LIEBALD, Rainer ,  ZIMMER, Jose

IPC: C03B27/03 ,  C03C21/00

CPC classification number: C03C21/002 ,  C03C3/087 ,  C03C3/093 ,  C03C17/23 ,  C03C21/005 ,  C03C21/008 ,  C03C2217/231 ,  C03C2218/34

Abstract: A thin glass article having a first face and a second face, a method for producing it and a use thereof are provided. The article has one or more edges joining the first and the second face and a thickness between the first and the second face, where the both faces and the one or more edges together form an outer surface of the thin glass article. The article has a non-uniform ion-exchanged surface layer on its outer surface, wherein the non-uniformly ion-exchanged surface layer has an associated compressive surface stress which varies between a minimum and a maximum value over the outer surface and/or a depth of layer which varies between a minimum and a maximum value over the outer surface.

Abstract translation: 提供具有第一面和第二面的薄玻璃制品，其制造方法及其用途。 制品具有连接第一和第二面的一个或多个边缘以及第一和第二面之间的厚度，其中两个面和一个或多个边缘一起形成薄玻璃制品的外表面。 所述制品在其外表面上具有不均匀的离子交换表面层，其中所述非均匀离子交换表面层具有相关联的压缩表面应力，其在外表面上的最小值和最大值之间变化，和/或 层的深度在外表面之间在最小值和最大值之间变化。

公开(公告)号：WO2016095155A1

公开(公告)日：2016-06-23

申请号：PCT/CN2014/094196

申请日：2014-12-18

Applicant: SCHOTT GLASS TECHNOLOGIES (SUZHOU) CO. LTD.

Inventor： HOU, Yunfei ,  QIAN, Pengxiang ,  LIEBALD, Rainer

IPC: G01N21/17

CPC classification number: G01N21/94 ,  G01N21/8422

Abstract: A method for producing a bonded article (70) comprising providing an ultra-thin substrate (1), in particular an ultra-thin glass substrate, with a first surface (1.1) and a second surface (1.2), where the ultra-thin substrate (1) is at least partially transmissible to an electromagnetic inspection radiation, and providing a support substrate (60) having a first surface and a second surface. The method comprises laminating a dark-screen film (2) on the second surface of the ultra-thin substrate (1) to produce a laminated ultra-thin substrate prior to cleaning the first surface (1.1) of the ultra-thin substrate (1). After cleaning, the first surface (1.1) of the ultra-thin substrate (1) is inspected for impurities (27) by irradiating the first surface (1.1) with the electromagnetic inspection radiation and identifying impurities (27) by way of contrast between the irradiated impurities (27) and the dark-screen film (2). If a desired cleanliness has been reached, a bonded article (70) is produced by bonding the laminated ultra-thin substrate with its first surface to the first or second surface of the support substrate (60). A bonded article (70) and a method for inspecting a surface of an ultra-thin substrate for impurities (27) are also provided.

Abstract translation: 一种接合体（70）的制造方法，其特征在于，在所述超薄基板（1），特别是超薄玻璃基板上设置有第一面（1.1）和第二面（1.2） 衬底（1）至少部分地传播到电磁检查辐射，并且提供具有第一表面和第二表面的支撑衬底（60）。 该方法包括在超薄基板（1）的第二表面上层叠暗屏膜（2）以在清洁超薄基板（1）的第一表面（1.1）之前制造层叠的超薄基板 ）。 在清洁之后，通过用电磁检查辐射照射第一表面（1.1）并通过对比度来识别杂质（27）来检查超薄基板（1）的第一表面（1.1）的杂质（27） 照射的杂质（27）和暗屏膜（2）。 如果达到所需的清洁度，则通过将叠层的超薄基板与其第一表面接合到支撑基板（60）的第一或第二表面来制造粘合物（70）。 还提供了一种粘合制品（70）和用于检查超薄基材表面的杂质（27）的方法。

公开(公告)号：WO2019119341A1

公开(公告)日：2019-06-27

申请号：PCT/CN2017/117670

申请日：2017-12-21

Applicant: SCHOTT GLASS TECHNOLOGIES (SUZHOU) CO. LTD.

Inventor： FAN, Huiyan ,  XUE, Junming ,  QIAN, Pengxiang ,  JOTZ, Matthias ,  PRINCE, Fredrik

IPC: C03C3/091

Abstract: A glass article, a method of making the glass article, and uses of the glass article. The glass article has a UV-transmittance of more than 90%at 350 nm and at 500 nm and a total amount of SiO 2 , B 2 O 3 and Al 2 O 3 of at least 75 mol%. The article is prefer-ably used in the fields of biotechnology, MEMS, CIS, MEMS-like pressure sensor, display, micro array, electronic devices, microfluidics, semiconductor, high precision equipment, camera imag-ing, display technologies, sensor/semicon, electronic devices, home appliance, diagnostic prod-uct, and/or medical device.

公开(公告)号：WO2017066924A1

公开(公告)日：2017-04-27

申请号：PCT/CN2015/092320

申请日：2015-10-20

Applicant: SCHOTT GLASS TECHNOLOGIES (SUZHOU) CO. LTD.

Inventor： HOU, Yunfei ,  QIAN, Pengxiang ,  LIEBALD, Rainer

IPC: H01L21/673

CPC classification number: H01L21/67132 ,  H01L21/67092 ,  H01L21/6835 ,  H01L21/6836 ,  H01L2221/6834 ,  H01L2221/6835 ,  H01L2221/68381 ,  H01L2221/68386 ,  H01L2221/68395

Abstract: A method for de-bonding of a bonded article (1), in particular a bonded glass article (1), which comprises a carrier substrate (2), in particular a glass carrier substrate (2), having a bonding surface (3.1), and an ultra-thin substrate (3), in particular an ultra-thin glass substrate (3), having a first and a second surface (3.1, 3.2) and a thickness t, where the first surface (3.1) of the ultra-thin substrate (3) forms a bonding surface (3.1) with which the ultra-thin substrate (3) is bonded to the bonding surface (3.1) of the carrier substrate (2). The method comprises adhering a contact film (4) onto the second surface (3.2) of the ultra-thin substrate (3) and retaining the ultra-thin substrate (3) with its second surface (3.2) via the contact film (4) on a retaining surface (6.1) of a retaining device (6). The method further comprises de-bonding the ultra-thin substrate (3) from the carrier substrate (2) by applying a, preferably mechanical, de-bonding force to the carrier substrate (2) relative to the retaining device (6), and removing the contact film (4) from the second surface (3.2) of the de-bonded ultra-thin substrate (3). Preferably, a weakening treatment (8) is applied to the contact film (4) after the de-bonding of the ultra-thin substrate (3) which reduces the adhesion force between the contact film (4) and the second surface (3.2) of the ultra-thin substrate (3).

Abstract translation: （1），尤其是粘合的玻璃制品（1）的去粘合方法，该粘合的玻璃制品包括载体基底（2），尤其是玻璃载体基底（2） ，具有结合表面（3.1）和具有第一和第二表面（3.1,3.2）和厚度t的超薄基板（3），特别是超薄玻璃基板（3），其中 超薄基板（3）的第一表面（3.1）形成结合表面（3.1），超薄基板（3）通过结合表面（3.1）结合到载体基板（2）的结合表面（3.1）。 该方法包括通过接触膜（4）将接触膜（4）粘附到超薄基板（3）的第二表面（3.2）上并且用其第二表面（3.2）保持超薄基板（3） 在保持装置（6）的保持表面（6.1）上。 该方法还包括通过相对于保持装置（6）向载体基板（2）施加优选机械的分离力而将超薄基板（3）从载体基板（2）分离，以及 从剥离的超薄基板（3）的第二表面（3.2）去除接触膜（4）。 优选地，在减小接触膜（4）和第二表面（3.2）之间的粘合力的超薄基板（3）脱离之后，对接触膜（4）施加弱化处理（8） 的超薄基板（3）。

公开(公告)号：WO2016149861A1

公开(公告)日：2016-09-29

申请号：PCT/CN2015/074682

申请日：2015-03-20

Applicant: SCHOTT GLASS TECHNOLOGIES (SUZHOU) CO. LTD.

Inventor： HE, Feng ,  DA, Ning ,  QIAN, Pengxiang ,  WIEGEL, Thomas

IPC: C03B23/023 ,  C03B23/03 ,  C03B27/03 ,  C03C21/00 ,  C03C27/10

CPC classification number: C03B23/0235 ,  B32B17/06 ,  C03B23/0302 ,  C03B23/0307 ,  C03B23/0357 ,  C03C3/087 ,  C03C3/091 ,  C03C3/093 ,  C03C17/23 ,  C03C21/002 ,  C03C21/005 ,  C03C21/008 ,  C03C2217/231 ,  C03C2218/34

Abstract: A shaped glass article and a method for producing it are provided. The article is ultrathin and has two surfaces and one or more edges joining the two surfaces, and a thickness between the two surfaces. The article has at least one curved area with a non-vanishing surface curvature with a minimal curvature radius R if no external forces are applied. The method comprises providing an ultrathin glass with two surfaces and one or more edges joining the two surfaces, having a thickness between the two surfaces and shaping the ultrathin glass to a shaped ultrathin glass article by forming at least one curved area having a non-vanishing surface curvature with a minimal curvature radius R if no external forces are applied to the shaped ultrathin glass article.

Abstract translation: 提供成形玻璃制品及其制造方法。 制品是超薄的，并且具有两个表面和连接两个表面的一个或多个边缘以及两个表面之间的厚度。 如果没有施加外力，则该物品具有至少一个弯曲区域，具有非消失的表面曲率，具有最小曲率半径R. 该方法包括提供具有两个表面和连接两个表面的一个或多个边缘的超薄玻璃，其具有两个表面之间的厚度，并且通过形成至少一个具有不消失的弯曲区域将超薄玻璃成形为成形的超薄玻璃制品 如果没有外力施加到成形的超薄玻璃制品，则具有最小曲率半径R的表面曲率。