公开(公告)号：WO2018102439A1

公开(公告)日：2018-06-07

申请号：PCT/US2017/063754

申请日：2017-11-29

Applicant: STC. UNM

Inventor： BUSANA, Tito ,  BRUECK, Steven R.J. ,  FEEZELL, Daniel ,  BEHZADIRAD, Mahmoud

IPC: G01Q70/08 ,  G01Q70/16 ,  G01Q60/06 ,  G01Q60/38 ,  B82Y35/00

CPC classification number: G01Q70/12 ,  G01Q60/06 ,  G01Q60/38 ,  H01L21/02458 ,  H01L21/0254 ,  H01L21/02603 ,  H01L21/0262 ,  H01L21/02639 ,  H01L21/02645

Abstract: Nanowires that may be utilized in microscopy, for example atomic force microscopy (AFM), as part of an AFM probe, as well as for other uses, are disclosed. The nanowires may be formed from a Group III nitride such as an epitaxial layer that may be or include gallium nitride, indium nitride, aluminum nitride, and an alloy of these materials. During use of the AFM probe to measure a topography of a test sample surface, the nanowire can activated and caused to lase and emit a light, thereby illuminating the surface with the light. In an implementation, the light can be collected by the AFM probe itself, for example through an optical fiber to which the nanowire is attached.