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    MEMS SPRUNG CANTILEVER TUNABLE CAPACITORS AND METHODS
    1.
    发明申请
    MEMS SPRUNG CANTILEVER TUNABLE CAPACITORS AND METHODS 审中-公开
    MEMS SPRUNG悬臂可调电容器和方法

    公开(公告)号：WO2011088362A2

    公开(公告)日：2011-07-21

    申请号：PCT/US2011/021358

    申请日：2011-01-14

    申请人： WISPRY, INC. ,  DEREUS, Dana

    发明人： DEREUS, Dana

    CPC分类号： H01G5/18 ,  B81B3/007 ,  B81B2201/014 ,  H02N1/006

    摘要： The present subject matter relates to MEMS tunable capacitors and methods for operating such capacitors. The tunable capacitor can feature a primary stationary actuator electrode on a substrate, a secondary stationary actuator electrode on the substrate, a stationary RF signal capacitor plate electrode on the substrate, a sprung cantilever disposed over the substrate, a beam anchor connecting a first end of the sprung cantilever to the substrate, and one or more elastic springs or other biasing members connecting a second end of the sprung cantilever to the substrate, the second end being located distally from the first end. The spring cantilever can be movable between an OFF state defined by the potential difference between the stationary and moveable actuator electrodes being zero, and an ON state defined by a non-zero potential difference between the stationary and moveable actuator electrodes.

    摘要翻译： 本主题涉及MEMS可调电容器和用于操作这种电容器的方法。 该可调电容器可以具有位于衬底上的主静止致动器电极，衬底上的次静止致动器电极，位于衬底上的固定RF信号电容器板电极，设置在衬底上的弹簧悬臂，连接第一端 弹簧悬臂连接到基板，以及一个或多个弹性弹簧或其他偏压构件，将弹簧悬臂的第二端连接到基板，第二端位于第一端的远侧。 弹簧悬臂可以在由固定和可移动致动器电极之间的电势差为零的关闭状态和由固定和可移动致动器电极之间的非零电势差限定的ON状态之间移动。

    SYSTEMS, DEVICES, AND METHODS FOR REDUCING SURFACE DIELECTRIC CHARGING IN A RF MEMS ACTUATOR ELEMENT
    2.
    发明申请
    SYSTEMS, DEVICES, AND METHODS FOR REDUCING SURFACE DIELECTRIC CHARGING IN A RF MEMS ACTUATOR ELEMENT 审中-公开
    用于减少RF MEMS致动器元件表面电介质充电的系统，器件和方法

    公开(公告)号：WO2015153781A1

    公开(公告)日：2015-10-08

    申请号：PCT/US2015/023907

    申请日：2015-04-01

    申请人： WISPRY, INC.

    发明人： MOLINERO-GILES, David ,  CUNNINGHAM, Shawn, J. ,  DEREUS, Dana

    IPC分类号： H01H59/00

    CPC分类号： H01H59/0009 ,  B81B3/0086 ,  B81B2203/04 ,  H01H49/00 ,  H01H2059/0018 ,  H01H2059/0072

    摘要： The present subject matter relates to systems, devices, and methods for reducing surface dielectric charging in a RF MEMS actuator element. In particular, a micro-electro-mechanical systems (MEMS) can comprise a fixed electrode positioned on a substrate, a moveable electrode positioned substantially above the fixed electrode and separated from the fixed electrode by a gap, and at least one standoff bump positioned between the fixed electrode and the moveable electrode, wherein the at least one standoff bump extends into the gap. In this configuration, one or both of the fixed electrode or the moveable electrode can be patterned to define one or more hole that is substantially aligned with the one or more of the at least one standoff bump. The bump and the hole can both help to reduce the rate of surface dielectric charging and the total amount of charge generated.

    摘要翻译： 本主题涉及用于减少RF MEMS致动器元件中的表面介电充电的系统，装置和方法。 特别地，微电子机械系统（MEMS）可以包括位于基板上的固定电极，基本上位于固定电极上方并通过间隙与固定电极分离的可移动电极，以及位于 所述固定电极和所述可移动电极，其中所述至少一个支座凸起延伸到所述间隙中。 在该配置中，固定电极或可移动电极中的一个或两个可以被图案化以限定一个或多个基本上与至少一个支座凸块中的一个或多个对准的孔。 凸起和孔可以帮助降低表面介电充电速率和产生的电荷总量。

    ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS
    4.
    发明申请
    ACTUATOR PLATE PARTITIONING AND CONTROL DEVICES AND METHODS 审中-公开
    执行器板分离和控制装置和方法

    公开(公告)号：WO2014145646A1

    公开(公告)日：2014-09-18

    申请号：PCT/US2014/030448

    申请日：2014-03-17

    申请人： WISPRY, INC.

    发明人： DEREUS, Dana ,  CUNNINGHAM, Shawn, J. ,  MORRIS, Arthur, S.

    IPC分类号： B81B7/02 ,  H01G5/14

    CPC分类号： B81B3/001 ,  B81B3/0051 ,  B81B3/0056 ,  B81B2201/0221 ,  B81B2203/04 ,  B81B2203/053 ,  H01G4/1227 ,  H01G5/18

    摘要： Devices and methods of operating partitioned actuator plates to obtain a desirable shape of a movable component of a micro-electro¬ mechanical system (MEMS) device. The subject matter described herein can in some embodiments include a micro-electro-mechanical system (MEMS) device including a plurality of actuation electrodes attached to a first surface, where each of the one or more actuation electrode being independently controllable, and a movable component spaced apart from the first surface and movable with respect to the first surface. Where the movable component further includes one or more movable actuation electrodes spaced apart from the plurality of fixed actuation electrodes.

    摘要翻译： 操作分隔的致动器板以获得微机电系统（MEMS）装置的可移动部件的期望形状的装置和方法。 本文描述的主题可以在一些实施例中包括微电子机械系统（MEMS）装置，其包括附接到第一表面的多个致动电极，其中所述一个或多个致动电极中的每一个可独立控制，以及可移动部件 与第一表面间隔开并可相对于第一表面移动。 在可移动部件还包括与多个固定致动电极间隔开的一个或多个可动致动电极的地方。

    MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUSES AND RELATED METHODS
    5.
    发明申请
    MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VARIABLE CAPACITOR APPARATUSES AND RELATED METHODS 审中-公开
    微电子机械系统（MEMS）可变电容器装置及相关方法

    公开(公告)号：WO2014047525A1

    公开(公告)日：2014-03-27

    申请号：PCT/US2013/061065

    申请日：2013-09-20

    申请人： WISPRY, INC.

    发明人： MORRIS, Arthur, S. ,  DEREUS, Dana ,  BAYTAN, Norito

    IPC分类号： H01G5/16

    CPC分类号： H01G5/16 ,  B81B3/0008 ,  B81B3/0016 ,  B81B3/0051 ,  B81B2201/0221 ,  B81C1/00166 ,  B81C1/00476 ,  B81C2201/0109 ,  B81C2201/013 ,  H01G5/18 ,  H01G7/00

    摘要： Systems, devices, and methods for micro-electro-mechanical system (MEMS) tunable capacitors can include a fixed actuation electrode attached to a substrate, a fixed capacitive electrode attached to the substrate, and a movable component positioned above the substrate and movable with respect to the fixed actuation electrode and the fixed capacitive electrode. The movable component can include a movable actuation electrode positioned above the fixed actuation electrode and a movable capacitive electrode positioned above the fixed capacitive electrode. At least a portion of the movable capacitive electrode can be spaced apart from the fixed capacitive electrode by a first gap, and the movable actuation electrode can be spaced apart from the fixed actuation electrode by a second gap that is larger than the first gap.

    摘要翻译： 用于微机电系统（MEMS）可调谐电容器的系统，装置和方法可以包括附接到基板的固定致动电极，附接到基板的固定电容电极和位于基板上方的可移动部件， 固定的致动电极和固定的电容电极。 可移动部件可以包括位于固定致动电极上方的可动致动电极和位于固定电容电极上方的可动电容电极。 可移动电容电极的至少一部分可以通过第一间隙与固定电容电极间隔开，并且可移动致动电极可以通过比第一间隙大的第二间隙与固定的致动电极间隔开。

    MEMS DIE AND METHODS WITH MULTIPLE-PRESSURE SEALING
    6.
    发明申请
    MEMS DIE AND METHODS WITH MULTIPLE-PRESSURE SEALING 审中-公开
    具有多压密封的MEMS模具和方法

    公开(公告)号：WO2014004700A1

    公开(公告)日：2014-01-03

    申请号：PCT/US2013/047942

    申请日：2013-06-26

    申请人： WISPRY, INC.

    发明人： MORRIS, Arthur, S. ,  DEREUS, Dana

    IPC分类号： B81B3/00 ,  H01L25/00

    CPC分类号： B81B7/0041 ,  B81B7/02 ,  B81C1/00277 ,  B81C1/00293 ,  B81C2203/0136 ,  B81C2203/0145

    摘要： The present subject matter relates to systems and methods for sealing one or more MEMS devices within an encapsulated cavity. A first material layer can be positioned on a substrate, the first material layer comprising a first cavity and a second cavity that each have one or more openings out of the first material layer. At least the first cavity can be exposed to a first atmosphere and sealed while it is exposed to the first atmosphere while not sealing the second cavity. The second cavity can then be exposed to a second atmosphere that is different than the first atmosphere, and the second cavity can be sealed while it is exposed to the second atmosphere.

    摘要翻译： 本主题涉及用于密封封装空腔内的一个或多个MEMS器件的系统和方法。 第一材料层可以定位在基底上，第一材料层包括第一腔和第二腔，每个腔具有一个或多个开口离开第一材料层。 至少第一空腔可以暴露于第一气氛并且在暴露于第一气氛的同时不密封第二空腔时被密封。 然后可以将第二空腔暴露于与第一气氛不同的第二气氛，并且第二空腔可以在暴露于第二气氛期间被密封。

    SYSTEMS, DEVICES, AND METHODS TO REDUCE DIELECTRIC CHARGING IN MICRO-ELECTROMECHANICAL SYSTEMS DEVICES
    8.
    发明申请
    SYSTEMS, DEVICES, AND METHODS TO REDUCE DIELECTRIC CHARGING IN MICRO-ELECTROMECHANICAL SYSTEMS DEVICES 审中-公开
    用于减少微电子系统设备中的电介质充电的系统，装置和方法

    公开(公告)号：WO2016054648A1

    公开(公告)日：2016-04-07

    申请号：PCT/US2015/054043

    申请日：2015-10-05

    申请人： WISPRY, INC.

    发明人： DEREUS, Dana ,  MORRIS, Arthur, S. ,  MOLINERO-GILES, David

    IPC分类号： B81B7/02 ,  B81B5/00 ,  B81C1/00

    CPC分类号： H01G5/16 ,  B81B3/0008 ,  B81B3/0051 ,  B81B2201/0221

    摘要： The present subject matter relates to devices, systems, and methods for isolation of electrostatic actuators in MEMS devices to reduce or minimize dielectric charging. A tunable component can include a fixed actuator electrode positioned on a substrate, a movable actuator electrode carried on a movable component that is suspended over the substrate, one or more isolation bumps positioned between the fixed actuator electrode and the movable actuator electrode, and a fixed isolation landing that is isolated within a portion of the fixed actuator electrode that is at, near, and/or substantially aligned with each of the one or more isolation bumps. In this arrangement, the movable actuator electrode can be selectively movable toward the fixed actuator electrode, but the one or more isolation bumps can prevent contact between the fixed and movable actuator electrodes, and the fixed isolation landing can inhibit the development of an electric field in the isolation bump.

    摘要翻译： 本主题涉及用于隔离MEMS装置中的静电致动器的装置，系统和方法，以减少或最小化介电充电。 可调谐部件可以包括位于基板上的固定致动器电极，承载在可移动部件上的可移动致动器电极，悬挂在基板上，一个或多个隔离凸块，位于固定致动器电极和可动致动器电极之间， 在固定的致动器电极的一个或多个隔离凸块附近和/或基本对齐的部分内被隔离的隔离着陆。 在这种布置中，可移动致动器电极可以选择性地朝着固定致动器电极移动，但是一个或多个隔离凸块可以防止固定和可动致动器电极之间的接触，并且固定隔离着地可以抑制电场的发展 隔离凸块。