公开(公告)号：WO2014186337A1

公开(公告)日：2014-11-20

申请号：PCT/US2014/037800

申请日：2014-05-13

Applicant: MRSI SYSTEMS LLC

Inventor： CELIA, Jr., Nicholas Samuel ,  DEVASIA, Cyriac

IPC: H01L21/603 ,  H01L21/02

CPC classification number: H01L24/75 ,  B23K37/0408 ,  H01L24/13 ,  H01L24/81 ,  H01L2224/13101 ,  H01L2224/75101 ,  H01L2224/75251 ,  H01L2224/75252 ,  H01L2224/75265 ,  H01L2224/75266 ,  H01L2224/75267 ,  H01L2224/75281 ,  H01L2224/75282 ,  H01L2224/75301 ,  H01L2224/755 ,  H01L2224/75901 ,  H01L2224/81097 ,  H01L2224/81098 ,  H01L2224/81203 ,  H01L2224/81815 ,  H01L2924/181 ,  H01L2924/20105 ,  H01L2924/2011 ,  H01L2924/20111 ,  H01L2924/351 ,  H01L2924/014 ,  H01L2924/00014 ,  H01L2924/00

Abstract: Co-planarity adjustment systems and methods, gantries capable of applying high force without imposing moment loads to their bearings, systems and methods for achieving rapid heating and cooling and efficient slidable seal systems capable of sealing a chamber and injecting one or more fluids into the chamber as well as actively recovering portions of such fluid which have migrated into the seal itself are disclosed in the context of thermo-compression bonding systems, apparatuses and methods, although many alternative uses will be apparent to those of skill in the art.

Abstract translation: 共面调整系统和方法，能够施加大力而不对其轴承施加力矩载荷的龙门架，用于实现快速加热和冷却的系统和方法以及能够密封腔室并将一种或多种流体注入腔室中的高效滑动密封系统 以及在热压接系统，装置和方法的上下文中公开了已经迁移到密封件中的这种流体的主动回收部分，尽管许多替代用途对于本领域技术人员将是显而易见的。