非离子型聚合物在自停止多晶硅抛光液制备及使用中的应用

    公开(公告)号:WO2008067731A1

    公开(公告)日:2008-06-12

    申请号:PCT/CN2007/003482

    申请日:2007-12-07

    Inventor: 杨春晓 荆建芬

    CPC classification number: H01L21/32133 C09G1/02

    Abstract: The present invention discloses the application of polymers which comprise repeating units containing -(RO)- or -(RCOO)- groups in production of chemical mechanical polishing liquid of self-etch-stop of polysilicon and usage of the same, in which R is alkyl of C 1-10 . The polymers of the invention are used in production of polishing liquid and usage of the same, it can realize the process of self-etch-stop mechanism in chemical mechanical polishing of polysilicon under polishing conditions of constant conventional technical parameter, so as to prevent silicon dioxide channels from generating dishing defects of polysilicon, and to remove residual polysilicon from the silicon dioxide dishing defects and improve surface flatness of the polished wafers. Furthermore it has wide technology window, which can greatly improve the productivity and lower the cost.

    FLOOR FINISH COMPOSITION, LAMINATES, AND METHODS FOR TREATING FLOORS
    4.
    发明申请
    FLOOR FINISH COMPOSITION, LAMINATES, AND METHODS FOR TREATING FLOORS 审中-公开
    地板表面处理,层压板及处理方法

    公开(公告)号:WO2005071032A3

    公开(公告)日:2005-12-08

    申请号:PCT/US2005000834

    申请日:2005-01-12

    CPC classification number: C09G1/16

    Abstract: A floor finish is provided including a film former, a lightness inducing agent, and a diluent. The floor finish composition includes a film former, a lightness inducing agent, and a diluent, with the lightness inducing agent being included in an amount sufficient for the composition to provide, when evaluated using a hardened finish having a thickness of about 0.005 mm on a LENETA Form 5C Opacity chart and a MINISCAN XE Plus color spectrophotometer having 45° illumination and a 0° viewing geometry (a) an increased lightness value L* on the black portion of the chart and (b) a contrast ratio (CR080) less than about 0.7 when evaluated on the black and white portions of the chart. Laminates, methods for treating a floor, and kits are also provided.

    Abstract translation: 提供了一种地板饰面,包括成膜剂,亮度诱导剂和稀释剂。 地板涂料组合物包括成膜剂,亮度诱导剂和稀释剂,其中亮度诱导剂的含量足以使组合物在使用厚度为约0.005mm的硬化处理剂 LENETA Form 5C不透明度图和MINISCAN XE Plus彩色分光光度计,具有45°照度和0°观察几何形状(a)图表黑色部分上增加的亮度值L *,(b)对比度(CR080)小于 在图表的黑色和白色部分进行评估时约为0.7。 还提供层压板,处理地板的方法和试剂盒。

    POLISH COMPOSITIONS
    6.
    发明申请
    POLISH COMPOSITIONS 审中-公开
    抛光组合物

    公开(公告)号:WO02033015A1

    公开(公告)日:2002-04-25

    申请号:PCT/GB2001/004652

    申请日:2001-10-18

    CPC classification number: C09G1/16 C08G77/04

    Abstract: A polish composition includes a siloxane polymer of formula (III) wherein each group A independently represents an alkyl group having up to 6 carbon atoms, M represents an alkyl group having up to 6 carbons atoms and Q represents an alkyl group, wherein a proportion of the groups Q have more than 20 carbon atoms and the remainder have up to 6 carbon atoms, wherein "x" is an integer selected to give a molecular weight of the polymer III in the range 3,000-30,000. In prior polish compositions the radical "Q" have been of shorter chain lengths. We have found that a longer chain length promoters reduced smearing.

    Abstract translation: 抛光组合物包括式(III)的硅氧烷聚合物,其中每个基团A独立地表示具有至多6个碳原子的烷基,M表示具有至多6个碳原子的烷基,Q表示烷基,其中, 基团Q具有多于20个碳原子,其余的具有多达6个碳原子,其中“x”是选择的聚合物III的分子量在3,000-3,000范围内的整数。 在以前的抛光组合物中,激进的“Q”具有较短的链长度。 我们发现更长的链长促进剂减少了涂片。

    POLISH COMPOSITION AND METHOD OF USE
    8.
    发明申请
    POLISH COMPOSITION AND METHOD OF USE 审中-公开
    抛光组合物及其使用方法

    公开(公告)号:WO01023487A1

    公开(公告)日:2001-04-05

    申请号:PCT/US2000/001089

    申请日:2000-01-18

    CPC classification number: C09G1/10 C09G1/16

    Abstract: A polish composition comprising a base component and an alkylated fluorochemical oligomer. The oligomer comprises a fluorochemical oligomeric portion, an aliphatic moiety, and a linking group which links the two. The base component of the polish composition may be a wax, a silicone oil, or a mixture of the two.

    Abstract translation: 一种抛光组合物,其包含碱组分和烷基化氟化物低聚物。 低聚物包含氟化合物低聚部分,脂族部分和连接两者的连接基团。 抛光组合物的基础组分可以是蜡,硅油或两者的混合物。

    POLISH COMPOSITION AND METHOD OF USE
    9.
    发明申请
    POLISH COMPOSITION AND METHOD OF USE 审中-公开
    抛光组合物及其使用方法

    公开(公告)号:WO00068333A1

    公开(公告)日:2000-11-16

    申请号:PCT/US1999/020065

    申请日:1999-09-01

    CPC classification number: C09G1/16 C09G1/10

    Abstract: A polish composition comprising a base component and a alkylated fluorochemical oligomer. The oligomer comprises a fluorochemical oligomeric portion, an aliphatic moiety, and a linking group which links the two. The base component of the polish composition may be a wax, a silicone oil, or a mixture of the two.

    Abstract translation: 一种抛光组合物,其包含碱成分和烷基化氟化物低聚物。 低聚物包含氟化合物低聚部分,脂族部分和连接两者的连接基团。 抛光组合物的基础组分可以是蜡,硅油或两者的混合物。

    CONTINUOUS BULK POLYMERIZATION AND ESTERIFICATION PROCESS AND COMPOSITIONS INCLUDING THE POLYMERIC PRODUCT
    10.
    发明申请
    CONTINUOUS BULK POLYMERIZATION AND ESTERIFICATION PROCESS AND COMPOSITIONS INCLUDING THE POLYMERIC PRODUCT 审中-公开
    连续聚合和纯化方法和包括聚合物产品的组合物

    公开(公告)号:WO00002934A1

    公开(公告)日:2000-01-20

    申请号:PCT/US1999/015163

    申请日:1999-07-02

    Abstract: A continuous bulk polymerization and esterification process includes continuously charging into a reaction zone at least one ethylenically unsaturated acid-functional monomer and at least one linear or branched chain alkanol having greater than 11 carbon atoms. The process includes including maintaining a flow rate through the reaction zone sufficient to provide an average residence time of less than 60 minutes and maintaining a temperature in the reaction zone sufficient to produce a polymeric product incorporating at least some of the alkanol as an ester of the polymerized ethylenically unsaturated acid-functional monomer. The polymeric product is used in various processes to produce water-based compositions including emulsions and dispersions such as oil emulsions, wax dispersions, pigment dispersions, surfactants and coatings which contain the polymeric product. A polymeric surfactant includes at least one ethylenically unsaturated acid-functional monomer which has been radically incorporated into the polymeric surfactant and at least one ester of the incorporated ethylenically unsaturated acid-functional monomer which has a linear or branched chain alkyl group with greater than 11 carbon atoms. The molar critical micelle concentration of the polymeric surfactant is less than 1.0 x 10 moles/liter. Aqueous 2 percent neutralized solutions of certain polymeric surfactants have a surface tension of less than 45 mN/m at 30 DEG C and exhibit a decrease in surface tension of at least 5 mN/m as the temperature warms from 30 DEG C to 50 DEG C.

    Abstract translation: 连续本体聚合和酯化方法包括将至少一种烯属不饱和酸官能单体和至少一种具有大于11个碳原子的直链或支链链烷醇连续地加入到反应区中。 该方法包括保持通过反应区的流速足以提供小于60分钟的平均停留时间,并保持反应区中的温度足以产生聚合产物,该聚合物与至少一些烷醇作为 聚合的烯键式不饱和酸官能单体。 聚合物产品用于各种工艺中以生产水性组合物,包括乳液和分散体,例如油乳剂,蜡分散体,颜料分散体,表面活性剂和含有聚合产物的涂料。 聚合物表面活性剂包括至少一种烯键式不饱和酸官能单体,其已经自由地掺入聚合物表面活性剂和至少一种具有直链或支链烷基的大于11碳的烯属不饱和酸官能单体的酯 原子。 聚合物表面活性剂的摩尔临界胶束浓度小于1.0×10 -2摩尔/升。 某些聚合物表面活性剂的2%中和水溶液的表面张力在30℃下的表面张力小于45mN / m,当温度从30℃升至50℃时表面张力降低至少5mN / m 。

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