METHODS OF THERMOREFLECTANCE THERMOGRAPHY
    1.
    发明申请
    METHODS OF THERMOREFLECTANCE THERMOGRAPHY 审中-公开
    热变温热学方法

    公开(公告)号:WO2010037002A3

    公开(公告)日:2010-07-22

    申请号:PCT/US2009058565

    申请日:2009-09-28

    Abstract: An embodiment of a method of performing thermoreflectance measurements with an imaging system comprises: reflecting radiation from a number of points in a sample in response to an illuminating radiation while a temperature modulation is applied to the sample; acquiring digital images of the reflected radiation after the reflected radiation passes through an aperture; and deriving a map of relative reflectivity of the sample based on the digital images. At least a portion of the illuminating radiation can pass through at least a portion of the sample and is reflected at a change refractive index interface.

    Abstract translation: 使用成像系统执行热反射测量的方法的实施例包括:当对样品施加温度调制时,响应于照射辐射反射来自样品中的多个点的辐射; 在反射的辐射通过孔之后获取反射的辐射的数字图像; 并且基于数字图像得到样本的相对反射率的图。 照射辐射的至少一部分可以穿过样品的至少一部分并且在变化的折射率界面处被反射。

    METHOD FOR MEASURING QUANTITATIVE TEMPERATURE AND THERMAL CONDUCTIVITY USING A SCANNING THERMAL MICROSCOPE
    3.
    发明申请
    METHOD FOR MEASURING QUANTITATIVE TEMPERATURE AND THERMAL CONDUCTIVITY USING A SCANNING THERMAL MICROSCOPE 审中-公开
    使用扫描热显微镜测量定量温度和热导率的方法

    公开(公告)号:WO2011002201A3

    公开(公告)日:2011-04-14

    申请号:PCT/KR2010004204

    申请日:2010-06-29

    CPC classification number: G01Q60/58 B82Y35/00 G01N25/18

    Abstract: The present invention relates to a scanning thermal microscope which scans a specimen at a nanoscale resolution to display thermal characteristics or the like of the specimen in images, and to a method for measuring quantitative temperature and thermal conductivity using the scanning thermal microscope. Particularly, the present invention proposes a scanning thermal microscope and a method for measuring quantitative temperature and thermal conductivity using the scanning thermal microscope, wherein the method comprises: a step of scanning a specimen while a probe of the scanning thermal microscope contacts the specimen, to measure the temperature (that is, a contact mode temperature) of the specimen; a step of scanning the specimen multiple times in accordance with the height of the probe of the scanning thermal microscope from the specimen, to measure the temperature (that is, a contactless mode temperature) of the specimen; a step of calculating an interpolating temperature, in which the height of the probe from the specimen is zero, by an extrapolation from the contactless mode temperature obtained by the multiple scanning operations; and a step of acquiring a local quantitative temperature and thermal conductivity by comparing the contact mode temperature with the interpolating temperature.

    Abstract translation: 本发明涉及一种扫描热显微镜,其以纳米分辨率扫描样品以显示图像中的样本的热特性等,以及使用扫描热显微镜测量定量温度和热导率的方法。 特别地,本发明提出了一种扫描热显微镜和使用扫描热显微镜测量定量温度和导热率的方法,其中该方法包括:扫描热显微镜的探针接触样本时扫描样本的步骤, 测量样品的温度(即接触模式温度); 根据扫描热显微镜的探针的高度,从试样多次扫描试样,测定试样的温度(即非接触模式温度)的步骤; 通过从通过多次扫描操作获得的非接触模式温度的外推来计算探针从试样的高度为零的内插温度的步骤; 以及通过将接触模式温度与内插温度进行比较来获取局部定量温度和热导率的步骤。

    주사탐침열현미경을 이용한 정량적 온도 및 열전도도 계측방법
    4.
    发明申请
    주사탐침열현미경을 이용한 정량적 온도 및 열전도도 계측방법 审中-公开
    使用扫描探针显微镜定量测量温度和热导率

    公开(公告)号:WO2011002201A2

    公开(公告)日:2011-01-06

    申请号:PCT/KR2010/004204

    申请日:2010-06-29

    Inventor: 권오명 김경태

    CPC classification number: G01Q60/58 G01N25/18

    Abstract: 본 발명은 나노스케일(nano scale)의 해상력을 가지고 시편을 주사(scanning)하여 시편의 열적 특성 등을 이미지로 나타내는 주사탐침열현미경 및 이를 이용한 정량적 온도 및 열전도도 계측방법에 관한 것이다. 특히 본 발명은 주사탐침열현미경의 탐침이 시편에 접촉된 상태에서 상기 시편을 주사하여 상기 시편의 온도(즉, 접촉모드 온도)을 계측하는 단계와; 상기 주사탐침열현미경의 탐침이 상기 시편으로부터 유격된 높이에 따라서 복수 회 상기 시편을 주사하여 상기 시편의 온도(즉, 비접촉모드 온도)를 계측하는 단계와; 상기 복수 회의 비접촉모드 온도로부터 외삽법에 의해, 상기 유격된 높이가 '0'인 보간 온도를 산출하는 단계와; 상기 접촉모드 온도과 상기 보간 온도의 비교에 의해, 국부 정량적 온도 및 열전도도를 획득하는 단계;를 포함하는 것을 특징으로 하는 주사탐침열현미경 및 이를 이용한 정량적 온도 및 열전도도 계측방법을 제시한다.

    Abstract translation:

    本发明是一种纳米级扫描探针热显微镜和其定量温度和使用表示由图像样品的热性质的扫描(扫描)的样品具有(纳米尺度)的分辨率的热导率的测量 < 特别地,本发明是扫描样品测量的温度的步骤(即,在接触模式中,温度)与样品的状态的扫描型探针显微镜进行热接触的探针的样品; 该方法通过扫描样品按照从样品测量的温度间隙的高度多次包括扫描探针显微镜列的探针(即,非接触模式,温度)试样的; 通过从多个非接触模式温度外推计算间隙高度为“0”的内插温度; 并且通过比较接触模式温度和插值温度以及使用其的定量温度和热导率测量方法来获得局部定量温度和热导率, p>

    原子間力顕微鏡及び距離制御方法

    公开(公告)号:WO2022024999A1

    公开(公告)日:2022-02-03

    申请号:PCT/JP2021/027558

    申请日:2021-07-26

    Inventor: 山本 大輔

    Abstract: 探針と試料との間の力を小さく保つことに適した原子間力顕微鏡等を提供する。原子間力顕微鏡1は、カンチレバー3と試料9の間の相互作用を利用して試料9を上下動(フィードバック)することにより試料9の表面構造を把握するものである。変位検出計15は、カンチレバー3に生じる物理量の変化を検出して検出信号を出力する。熱揺らぎ検出装置17は、検出信号から、カンチレバー3に生じる熱揺らぎを示す熱揺らぎ信号を抽出する。距離制御部21は、熱揺らぎ信号を用いてZピエゾ11を制御して試料9を上下動させる。

    SUPERCONDUCTING SCANNING SENSOR FOR NANOMETER SCALE TEMPERATURE IMAGING
    7.
    发明申请
    SUPERCONDUCTING SCANNING SENSOR FOR NANOMETER SCALE TEMPERATURE IMAGING 审中-公开
    超导扫描传感器用于纳米尺度温度成像

    公开(公告)号:WO2016142945A1

    公开(公告)日:2016-09-15

    申请号:PCT/IL2016/050262

    申请日:2016-03-10

    CPC classification number: G01Q60/58 G01N27/041

    Abstract: A device and methods for use thereof in low-temperature thermal scanning microscopy, providing non-contact, non-invasive localized temperature and thermal conductivity measurements in nanometer scale ranges with a temperature resolution in the micro-Kelvin order. A superconductive cap mounted on the tip of an elongated support probe is electrically-connected to superconductive leads for carrying electrical current through the cap. The critical superconducting current of the leads is configured to be greater than the critical current supported by the cap, and the cap's critical current is configured to be a function of its temperature. Thus, the temperature of the cap is measured by measuring its critical superconducting current. In a related embodiment, driving a current greater than the critical current of the cap quenches the cap's superconductivity, and permits the cap to dissipate resistive heat into the sample being scanned. Scanning of the sample in this mode thus images its thermal conductivity patterns.

    Abstract translation: 一种在低温热扫描显微镜中使用的装置及其方法,提供具有微开尔文次序的温度分辨率的纳米尺度范围内的非接触,非侵入性局部温度和热导率测量。 安装在细长支撑探针的尖端上的超导电帽电连接到超导引线,用于承载电流通过盖。 引线的临界超导电流被配置为大于由帽支持的临界电流,并且帽的临界电流被配置为其温度的函数。 因此,通过测量其临界超导电流来测量盖的温度。 在相关实施例中,驱动大于盖的临界电流的电流淬灭了帽的超导性,并且允许帽向被扫描的样品中散发电阻热。 因此,以此模式扫描样品可以显示其导热性图案。

    計測装置、原子間力顕微鏡、および計測方法

    公开(公告)号:WO2021020111A1

    公开(公告)日:2021-02-04

    申请号:PCT/JP2020/027391

    申请日:2020-07-14

    Abstract: 計測装置(10A,110)は、振動体(11)の共振周波数の近傍に設定された参照周波数を有する参照信号を生成する生成部(202A)と、振動体(11)の変位信号と生成部(202A)により生成された参照信号とに基づいて、参照周波数を含む所定範囲内における振動体(11)の熱振動振幅を検出する振幅検出部(204A)と、検出された熱振動振幅に基づいて、振動体(11)の共振周波数を算出する算出部(206A)とを備える。

    THERMAL PROBE FOR A NEAR-FIELD THERMAL MICROSCOPE AND METHOD FOR GENERATING A THERMAL MAP
    9.
    发明申请
    THERMAL PROBE FOR A NEAR-FIELD THERMAL MICROSCOPE AND METHOD FOR GENERATING A THERMAL MAP 审中-公开
    用于近场热显微镜的热探测器和用于产生热图的方法

    公开(公告)号:WO2017010884A1

    公开(公告)日:2017-01-19

    申请号:PCT/NL2016/050525

    申请日:2016-07-15

    Abstract: A thermal probe and method for generating a thermal map (M) of a sample interface (1). A scanning thermal microscope (100) is provided having at least one or more probe tips (11,12). The probe tips (11,12) are scanned at a near-field distance (D1) over the sample interface (1). Heat flux data (H) is recorded as a function of a relative position (X,Y) of the probe tip (11) over the sample interface (1). The thermal map (M) is calculated from the recorded heat flux data (H) based on a spatially resolved heat flux profile (P) of the probe tip (11) at the sample interface (1). The heat flux profile (P) has a local maximum at a lateral distance (R) across the sample interface (1) with respect to an apex (11a) of the probe tip (11).

    Abstract translation: 一种用于产生样品界面(1)的热图(M)的热探针和方法。 提供具有至少一个或多个探针尖端(11,12)的扫描热显微镜(100)。 探针尖端(11,12)在样品界面(1)上以近场距离(D1)扫描。 作为探针尖端(11)在样品界面(1)上的相对位置(X,Y)的函数记录热通量数据(H)。 基于在样品界面(1)处的探针尖端(11)的空间分辨热通量分布(P),从记录的热通量数据(H)计算热图(M)。 热通量分布(P)相对于探针尖端(11)的顶点(11a)在穿过样品界面(1)的横向距离(R)处具有局部最大值。

    THERMAL PROBE
    10.
    发明申请
    THERMAL PROBE 审中-公开
    热探头

    公开(公告)号:WO2016204611A1

    公开(公告)日:2016-12-22

    申请号:PCT/NL2016/050426

    申请日:2016-06-14

    CPC classification number: G01Q60/58 G01K5/62 G01K5/64

    Abstract: Thermal probe (10) for a scanning thermal microscope (100), use, and process of manufacturing. The thermal probe (10) comprises a single-material (M1) thermal conducting body (12) consisting of a probe frame (14) ending in a probe tip (11). A bi-material (M1,M2) cantilever strip (13) is connected to the probe frame (14) in thermal communication with the probe tip (11). The cantilever strip (13) in unbended state lies in-plane (X,Z) with the probe tip (11). The cantilever strip (13) comprises layers of material (M1,M2) having different coefficients of thermal expansion configured to bend the cantilever strip (13) with respect to the single-material thermal conducting body (12) as a function of the heat exchange (H) between the probe tip (11) and the microscopic structure (2) for measuring heat exchange (H) with a sample interface (1) by means of measuring the bending of the cantilever strip (13).

    Abstract translation: 用于扫描热显微镜(100)的热探针(10),使用和制造过程。 热探针(10)包括由结束于探针尖端(11)的探针架(14)组成的单一材料(M1)导热体(12)。 双材料(M1,M2)悬臂条(13)连接到与探头(11)热连通的探针架(14)。 未弯曲状态的悬臂条(13)与探针尖端(11)位于平面(X,Z)中。 悬臂条(13)包括具有不同的热膨胀系数的材料层(M1,M2),其被配置为相对于单材料导热体(12)相对于单材料导热体(12)弯曲,作为热交换的函数 (11)和用于通过测量悬臂条(13)的弯曲而用样品界面(1)测量热交换(H)的微观结构(2)之间的距离(H)。

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