レーザ装置、及び電子デバイスの製造方法

    公开(公告)号:WO2023089673A1

    公开(公告)日:2023-05-25

    申请号:PCT/JP2021/042130

    申请日:2021-11-16

    Abstract: 本開示の一観点に係るレーザ装置は、レーザ光(Lp)を出射する発振器と、レーザ光(Lp)を一対の放電電極(33a)を含むチャンバ(32)内で増幅する増幅器(30a)と、チャンバ(32)を挟んで対向する位置に配置されて、一対の放電電極(33a)の間で交差する第1光路(P1)及び第2光路(P2)を含むリング共振器を構成するフロント側光学系(35)及びリア側光学系(36)と、第1光路(P1)上又は第2光路(P2)上に配置された第1平行平面基板(61、62)と、を備える。第1光路(P1)は、フロント側光学系(35)が、発振器から入射するレーザ光(Lp)をリア側光学系(36)に向けて出射する光路である。第2光路(P2)は、リア側光学系(36)が、第1光路(P1)を介して入射するレーザ光(Lp)をフロント側光学系(35)に向けて出射する光路である。第1平行平面基板(61、62)は、第1光路(P1)及び第2光路(P2)を、チャンバ(32)側で近づく方向に平行移動させる。

    高稳定性准分子激光器装置
    2.
    发明申请

    公开(公告)号:WO2023273392A1

    公开(公告)日:2023-01-05

    申请号:PCT/CN2022/079621

    申请日:2022-03-07

    Abstract: 一种高稳定性准分子激光器装置,包括:放电谐振腔、线宽压窄模块、检测模块以及控制模块;所述线宽压窄模块包括沿由所述放电谐振腔第一侧激光出射方向依次设置的扩束装置和中阶梯光栅;检测模块包括中心波长精测装置和中心波长粗测装置;其中,所述中心波长粗测装置包括反射装置、光束会聚装置及第一光电探测装置,用于进行中心波长粗测;中心波长精测装置设置于与所述放电谐振腔的第一侧相对的第二侧,用于接收由第二侧出射的激光束,并进行中心波长精测;所述控制模块分别与所述放电谐振腔、所述中心波长精测装置和中心波长粗测装置相连接,用于根据所述中心波长精测装置和中心波长粗测装置的测量结果,对放电谐振腔中的参数进行调整。

    APPARATUS AND METHOD FOR MULTIPLE FREQUENCY COMB GENERATION AND APPLICATIONS THEREOF

    公开(公告)号:WO2020192887A1

    公开(公告)日:2020-10-01

    申请号:PCT/EP2019/057458

    申请日:2019-03-25

    Abstract: A multiple frequency comb source apparatus (100) for simultaneously creating a first laser pulse sequence representing a first frequency comb (1) and at least one further laser pulse sequence rep- resenting at least one further frequency comb (2), wherein at least two of the first and at least one further pulse sequences have different repetition frequencies, comprises a laser resonator device (10) comprising multiple resonator mirrors including first end mirrors EM 1 ,OC 1 providing a first laser resonator (11), a laser gain medium (21, 22) being arranged in the laser resonator device (10), and a pump device (30) being arranged for pumping the laser gain medium (21), wherein the laser resonator device (10) is configured for creating the first and at least one further laser pulse sequences by pumping and passively mode-locking the laser gain medium (21), the resonator mirrors of the laser resonator device (10) include further end mirrors EM 2 , OC 2 providing at least one further laser resonator (12), the first laser resonator (11) and the at least one further laser resonator (12) share the laser gain medium (21), resonator modes of the first laser resonator (11) and the at least one further laser resonator (12) are displaced relative to each other, wherein the resonator modes are located in the laser gain medium (21) at separate beam path spots, and at least one of the first and further end mirrors EM 1 , EM 2 , OC 1 , OC 2 is adjustable so that the repetition frequency of at least one of the first and at least one further laser pulse sequences can be set independently from the repetition frequency of the other one of the first and at least one further laser pulse sequences. Furthermore, a spectroscopic measuring method, a spectroscopy apparatus and a multiple frequency comb generation method are described.

    LASER DIODE PUMPED WHITE LIGHT EMITTER MODULE

    公开(公告)号:WO2019216921A1

    公开(公告)日:2019-11-14

    申请号:PCT/US2018/032420

    申请日:2018-05-11

    Abstract: An apparatus includes a thermally conductive housing (102) including a reflective chamber (110), the reflective chamber (110) including a reflective surface (120) on a first side of the reflective chamber (110) and an orifice (130) on a second side of the reflective chamber (110). The reflective surface (120) includes a converging surface (122) annularly surrounding a central recirculating surface (124). The apparatus includes a phosphor converter (140) at the orifice (130) of the reflective chamber (110). The apparatus further includes a plurality of laser diodes (150) arranged annularly around the orifice (130), the plurality of laser diodes (150) configured to emit laser beams towards the converging surface (122).

    用于可调激光器的反射镜结构和可调激光器

    公开(公告)号:WO2018205580A1

    公开(公告)日:2018-11-15

    申请号:PCT/CN2017/114768

    申请日:2017-12-06

    Abstract: 一种用于可调激光器的反射镜结构和可调激光器。可调激光器采用超结构光栅作为反射镜(08),超结构光栅所在区域的周围形成悬空结构,利用悬空结构形成热隔离,提高热阻,减少了热量流失,使得热量集中在超结构光栅所在区域,从而能够提高反射镜(08)的热调谐效率,有利于降低可调激光器的整体功耗。同时,通过设置底部支撑结构(10d)为悬空结构提供底部支撑,能够增强悬空结构的机械强度。另外,任意两个底部支撑结构(10d)在超结构光栅中对应的区域落在超结构光栅的空间周期中的不同位置,有助于在热调谐时避免超结构光栅的反射谱的平坦性恶化,从而有助于避免可调激光器性能的恶化。

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