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发明授权
CN101159228B 处理气体供给机构、供给方法及气体处理装置 有权

处理气体供给机构、供给方法及气体处理装置
摘要：
本发明涉及处理气体供给机构、供给方法及气体处理装置，该处理气体供给机构能够在短时间内供给使处理容器内变成设定压力的量的处理气体。处理气体供给机构(3)包括：用于向作为收容基板(G)的处理容器的腔室(2)内供给作为处理气体的氦气的He气体供给源(30)；用于暂时贮存来自He气体供给源(30)的氦气的处理气体罐(33)；和将来自He气体供给源(30)的氦气供给处理气体罐(33)并将处理气体罐(33)内的氦气供给腔室(2)内的处理气体流通部件(35)，氦气经由处理气体流通部件(35)被从He气体供给源(30)暂时贮存在处理气体罐(33)中，并从处理气体罐(33)供给到腔室(2)内。
摘要（英）：

The invention relates to a treatment gas supplying mechanism, supplying method and gas treatment device, wherein the treatment gas supplying mechanism supplies treatment gas for making the treatment container at preset pressure in short time. The treatment gas supplying mechanism (3) comprises: a He gas supply resource (30) for supplying helium gas as treatment gas to a chamber (2) as treatment container of holding substrate; a treatment gas jar (33) for temporarily storing helium gas from the He gas supply resource (30); a treatment gas circulating parts (35) for supplying helium gas from the He gas supply resource (30) to the treatment gas jar (33) and supplying the helium gas from the treatment gas jar (33) to chamber (2), wherein the helium gas is temporarily stored in the treatment gas jar (33) from the He gas supply resource (30) through the treatment gas circulating parts (35) and supplied to the chamber (2) from the treatment gas jar (33).

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