Invention Grant
- Patent Title: CMP compositions and methods for polishing nickel phosphorous surfaces
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Application No.: US14094921Application Date: 2013-12-03
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Publication No.: US10358579B2Publication Date: 2019-07-23
- Inventor: Ke Zhang , Michael White , Tsung-Ho Lee , Steven Grumbine , Hon-Wu Lau
- Applicant: Cabot Microelectronics Corporation
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Agent Thomas Omholt; Erika S. Wilson
- Main IPC: G09G1/18
- IPC: G09G1/18 ; C23F3/06 ; C09G1/02 ; H01L21/304 ; H01L21/306 ; H01L21/321 ; C09G1/18

Abstract:
Chemical mechanical polishing (CMP) compositions and methods for planarizing a nickel phosphorus (NiP) substrate are described. A NiP CMP method comprises abrading a surface of the substrate with a CMP composition. The CMP composition comprises a colloidal silica abrasive suspended in an aqueous carrier having a pH of less than 2, and containing a primary oxidizing agent comprising hydrogen peroxide, a secondary oxidizing agent comprising a metal ion capable of reversible oxidation and reduction in the presence of NiP and hydrogen peroxide, a chelating agent, and glycine. The chelating agent comprises two or three carboxylic acid substituents capable of chelating to the metal ion of the secondary oxidizing agent.
Public/Granted literature
- US20150152289A1 CMP COMPOSITIONS AND METHODS FOR POLISHING NICKEL PHOSPHOROUS SURFACES Public/Granted day:2015-06-04
Information query
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