- Patent Title: Structure and formation method of semiconductor device structure
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Application No.: US16390246Application Date: 2019-04-22
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Publication No.: US10366926B1Publication Date: 2019-07-30
- Inventor: Che-Cheng Chang , Chih-Han Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L21/3105 ; H01L21/311 ; H01L21/8234 ; H01L27/088 ; H01L29/06 ; H01L29/49 ; H01L29/51 ; H01L29/66 ; H01L29/78 ; H01L21/321

Abstract:
Structures and formation methods of a semiconductor device structure are provided. The semiconductor device structure includes a fin structure over a semiconductor substrate and a gate stack covering a portion of the fin structure. The gate stack includes a gate dielectric layer, a work function layer, and a conductive filling over the work function layer. The semiconductor device structure also includes a dielectric layer covering the fin structure. The dielectric layer is in direct contact with the conductive filling.
Public/Granted literature
- US20190244863A1 STRUCTURE AND FORMATION METHOD OF SEMICONDUCTOR DEVICE STRUCTURE Public/Granted day:2019-08-08
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