Invention Grant
- Patent Title: Parallel test structure
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Application No.: US15682704Application Date: 2017-08-22
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Publication No.: US10475677B2Publication Date: 2019-11-12
- Inventor: Tian Shen , Anil Kumar , Yuncheng Song , Kong Boon Yeap , Ronald G. Filippi, Jr. , Linjun Cao , Seungman Choi , Cathryn J. Christiansen , Patrick R. Justison
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Gibb & Riley, LLC
- Agent Michael J. LeStrange, Esq.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G01R3/00 ; G01R31/12 ; H01L21/66 ; G01R31/28

Abstract:
An exemplary apparatus includes a testing module connected to, and providing a test voltage to, an integrated circuit containing devices under test. The testing module performs a time-dependent dielectric breakdown (TDDB) test on the devices under test. A decoder is connected to the devices under test and the testing module. The decoder selectively connects each device being tested to the testing module. Efuses are connected to a different one of the devices under test. The efuses separately electrically disconnect each of the devices under test from the test voltage upon failure of a corresponding device under test. Protection circuits are connected between the efuses and a ground voltage. Each protection circuit provides a shunt around the decoder upon failure of the device under test.
Public/Granted literature
- US20190067056A1 PARALLEL TEST STRUCTURE Public/Granted day:2019-02-28
Information query
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