Invention Grant
- Patent Title: Semiconductor memory including semiconductor oxide
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Application No.: US16041460Application Date: 2018-07-20
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Publication No.: US10553601B2Publication Date: 2020-02-04
- Inventor: Tsutomu Tezuka , Fumitaka Arai , Keiji Ikeda , Tomomasa Ueda , Nobuyoshi Saito , Chika Tanaka , Kentaro Miura , Tomoaki Sawabe
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2017-051456 20170316; JP2018-045813 20180313
- Main IPC: H01L27/11568
- IPC: H01L27/11568 ; G11C16/04 ; H01L29/66 ; G11C5/06 ; G11C16/26 ; G11C16/08 ; G11C16/10 ; G11C11/56 ; H01L27/11582 ; H01L29/792

Abstract:
According to one embodiment, a memory includes: a member extending in a first direction and including an oxide semiconductor layer including first to third portions arranged in order from the bit line to the source line; first, second and third conductive layers arranged along the first direction and facing the first to third portions, respectively, the first conductive layer including first material, and each of the second and third conductive layer including a second material different from the first material; a memory cell in a first position corresponding to the first portion, the memory cell including a charge storage layer in the oxide semiconductor layer; a first transistor in a second position corresponding to the second portion; and a second transistor in a third position corresponding to the third portion.
Public/Granted literature
- US20180350829A1 SEMICONDUCTOR MEMORY Public/Granted day:2018-12-06
Information query
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