Invention Grant
- Patent Title: Plate design to decrease noise in semiconductor devices
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Application No.: US15800474Application Date: 2017-11-01
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Publication No.: US10658482B2Publication Date: 2020-05-19
- Inventor: Chih-Chang Cheng , Fu-Yu Chu , Ming-Ta Lei , Ruey-Hsin Liu , Shih-Fen Huang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/78 ; H01L21/265 ; H01L21/28 ; H01L29/06 ; H01L29/08 ; H01L29/49

Abstract:
A semiconductor device and method for forming the semiconductor device are provided. In some embodiments, a semiconductor substrate comprises a device region. An isolation structure extends laterally in a closed path to demarcate the device region. A first source/drain region and a second source/drain region are in the device region and laterally spaced. A sidewall of the first source/drain region directly contacts the isolation structure at a first isolation structure sidewall, and remaining sidewalls of the first source/drain region are spaced from the isolation structure. A selectively-conductive channel is in the device region, and extends laterally from the first source/drain region to the second source/drain region. A plate comprises a central portion and a first peripheral portion. The central portion overlies the selectively-conductive channel, and the first peripheral portion protrudes from the central portion towards the first isolation structure sidewall.
Public/Granted literature
- US20190131414A1 PLATE DESIGN TO DECREASE NOISE IN SEMICONDUCTOR DEVICES Public/Granted day:2019-05-02
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