Invention Grant
- Patent Title: Semiconductor constructions comprising dielectric material, and methods of forming dielectric fill within openings extending into semiconductor constructions
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Application No.: US16179415Application Date: 2018-11-02
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Publication No.: US10763155B2Publication Date: 2020-09-01
- Inventor: Gurtej S. Sandhu , Scott L. Light , John A. Smythe , Sony Varghese
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L21/762 ; H01L21/02 ; H01L21/3105 ; H01L29/06 ; G03F7/075 ; G03F7/038 ; G03F7/039 ; G03F7/20 ; G03F7/30 ; G03F7/023 ; H01L21/311

Abstract:
Some embodiments include a semiconductor construction which has one or more openings extending into a substrate. The openings are at least partially filled with dielectric material comprising silicon, oxygen and carbon. The carbon is present to a concentration within a range of from about 3 atomic percent to about 20 atomic percent. Some embodiments include a method of providing dielectric fill across a semiconductor construction having an opening extending therein. The semiconductor construction has an upper surface proximate the opening. The method includes forming photopatternable dielectric material within the opening and across the upper surface, and exposing the photopatternable dielectric material to patterned actinic radiation. Subsequently, the photopatternable dielectric material is developed to pattern the photopatternable dielectric material into a first dielectric structure which at least partially fills the opening, and to remove the photopatternable dielectric material from over the upper surface.
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