Invention Grant
- Patent Title: Three-dimensional memory device having stressed vertical semiconductor channels and method of making the same
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Application No.: US16221942Application Date: 2018-12-17
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Publication No.: US10797061B2Publication Date: 2020-10-06
- Inventor: Akio Nishida , Toshihiro Iizuka , Rahul Sharangpani , Raghuveer S. Makala , Adarsh Rajashekhar , Fei Zhou , Srikanth Ranganathan
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11556 ; H01L27/11524 ; H01L27/1157 ; H01L27/11519 ; H01L29/08 ; H01L29/10 ; H01L21/324 ; H01L27/11565 ; H01L21/8239 ; H01L21/8234 ; H01L27/11573 ; H01L27/11529

Abstract:
Three-dimensional memory devices include structures that induce a vertical tensile stress in vertical semiconductor channels to enhance charge carrier mobility. Vertical tensile stress may be induced by a laterally compressive stress applied by stressor pillar structure. The stressor pillar structures can include a stressor material such as a dielectric metal oxide material, silicon nitride, thermal silicon oxide or a semiconductor material having a greater lattice constant than that of the channel. Vertical tensile stress may be induced by a compressive stress applied by electrically conductive layers that laterally surround the vertical semiconductor channel, or by a stress memorization technique that captures a compressive stress from sacrificial material layers. Vertical tensile stress can be generated by a source-level pinning layer that prevents vertical expansion of the vertical semiconductor channel. Vertical tensile stress can be induced by using a layer stack including polysilicon and a silicon-germanium alloy for the vertical semiconductor channel.
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