- 专利标题: Surface treated abrasive particles for tungsten buff applications
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申请号: US15723886申请日: 2017-10-03
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公开(公告)号: US11043151B2公开(公告)日: 2021-06-22
- 发明人: Ji Cui , Helin Huang , Kevin P. Dockery , Pankaj K. Singh , Hung-Tsung Huang , Chih-Hsien Chien
- 申请人: Cabot Microelectronics Corporation
- 申请人地址: US IL Aurora
- 专利权人: Cabot Microelectronics Corporation
- 当前专利权人: Cabot Microelectronics Corporation
- 当前专利权人地址: US IL Aurora
- 代理商 Thomas Omholt; Erika R. Singleton; Francis J. Koszyk
- 主分类号: C09G1/02
- IPC分类号: C09G1/02 ; H01L21/768 ; H01L21/321 ; H01L21/3105 ; G09G1/02
摘要:
The invention provides a chemical-mechanical polishing composition comprising (a) an abrasive selected from the group consisting of alumina, ceria, titania, zirconia, and combinations thereof, wherein the abrasive is surface-coated with a copolymer comprising a combination of sulfonic acid monomeric units and carboxylic acid monomeric units a combination of sulfonic acid monomeric units and phosphonic acid monomeric units, (b) an oxidizing agent, and (c) water, wherein the polishing composition has a pH of about 2 to about 5. The invention further provides a method of chemically-mechanically polishing a substrate with the inventive chemical-mechanical polishing composition. Typically, the substrate comprises tungsten or cobalt and silicon oxide.
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