Invention Grant
- Patent Title: Method of polishing substrate and polishing composition set
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Application No.: US16630605Application Date: 2018-07-18
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Publication No.: US11124675B2Publication Date: 2021-09-21
- Inventor: Makoto Tabata
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Kiyosu
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Kiyosu
- Agency: Foley & Lardner LLP
- Priority: JPJP2017-141762 20170721
- International Application: PCT/JP2018/026976 WO 20180718
- International Announcement: WO2019/017407 WO 20190124
- Main IPC: C09G1/02
- IPC: C09G1/02 ; C09G1/00 ; B24B1/00 ; C09G1/06 ; C09K3/14 ; C09K13/06 ; C09G1/04 ; H01L21/321 ; H01L21/306 ; B24B37/04 ; H01L21/304

Abstract:
A substrate polishing method includes a stock polishing step comprising a plurality of stock polishing sub-steps in which a first polishing solution, a second polishing solution, and a third polishing solution are applied, in that order, to a substrate. A content COMP1 of water-soluble polymer P1 in the first polishing solution, a content COMP2 of water-soluble polymer P2 in the second polishing solution, and a content COMP3 of water-soluble polymer P3 in the third polishing solution satisfy COMP1
Public/Granted literature
- US20200181453A1 METHOD OF POLISHING SUBSTRATE AND POLISHING COMPOSITION SET Public/Granted day:2020-06-11
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