Invention Grant
- Patent Title: Opto electrical test measurement system for integrated photonic devices and circuits
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Application No.: US16863303Application Date: 2020-04-30
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Publication No.: US11187613B2Publication Date: 2021-11-30
- Inventor: Philippe Grosse , Patrick Le Maitre , Jean-Francois Carpentier
- Applicant: STMicroelectronics (Crolles 2) SAS
- Applicant Address: FR Crolles
- Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee Address: FR Crolles
- Agency: Crowe & Dunlevy
- Main IPC: G01M11/02
- IPC: G01M11/02 ; G02B6/28 ; G02B6/34 ; G02B6/12 ; G02B6/00 ; G01M11/00 ; G01R31/265 ; G01R31/27 ; G01R31/28 ; G01R31/303 ; G01R31/311 ; G01R31/317 ; G01R35/00

Abstract:
An optical testing circuit on a wafer includes an optical input configured to receive an optical test signal and photodetectors configured to generate corresponding electrical signals in response to optical processing of the optical test signal through the optical testing circuit. The electrical signals are simultaneously sensed by a probe circuit and then processed. In one process, test data from the electrical signals is simultaneously generated at each step of a sweep in wavelength of the optical test signal and output in response to a step change. In another process, the electrical signals are sequentially selected and the sweep in wavelength of the optical test signal is performed for each selected electrical signal to generate the test data.
Public/Granted literature
- US20200256759A1 OPTO ELECTRICAL TEST MEASUREMENT SYSTEM FOR INTEGRATED PHOTONIC DEVICES AND CIRCUITS Public/Granted day:2020-08-13
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