Invention Grant
- Patent Title: Apparatus with a substrate provided with plasma treatment
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Application No.: US16637545Application Date: 2017-09-22
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Publication No.: US11291122B2Publication Date: 2022-03-29
- Inventor: Darko Grujicic , Rengarajan Shanmugam , Sandeep Gaan , Adrian Bayraktaroglu , Roy Dittler , Ke Liu , Suddhasattwa Nad , Marcel A. Wall , Rahul N. Manepalli , Ravindra V. Tanikella
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2017/053068 WO 20170922
- International Announcement: WO2019/059933 WO 20190328
- Main IPC: C23C18/38
- IPC: C23C18/38 ; H05K3/38 ; C23C18/16 ; C23C18/18 ; H01L21/48 ; H05K3/42 ; H05K3/46 ; H05K1/11 ; H01L23/14

Abstract:
Embodiments of the present disclosure describe techniques for providing an apparatus with a substrate provided with plasma treatment. In some instances, the apparatus may include a substrate with a surface that comprises a metal layer to provide signal routing in the apparatus. The metal layer may be provided in response to a plasma treatment of the surface with a functional group containing a gas (e.g., nitrogen-based gas), to provide absorption of a transition metal catalyst into the surface, and subsequent electroless plating of the surface with a metal. The transition metal catalyst is to enhance electroless plating of the surface with the metal. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20200245472A1 APPARATUS WITH A SUBSTRATE PROVIDED WITH PLASMA TREATMENT Public/Granted day:2020-07-30
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