- Patent Title: Method for growth of a merged crystal by bonding at least a first and second crystal to an adhesion layer to form a tiled substrate and growing a crystalline composition over said tiled substrate
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Application No.: US16550947Application Date: 2019-08-26
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Publication No.: US11453956B2Publication Date: 2022-09-27
- Inventor: Mark P. D'Evelyn , James S. Speck , Derrick S. Kamber , Douglas W. Pocius
- Applicant: SLT TECHNOLOGIES, INC.
- Applicant Address: US CA Los Angeles
- Assignee: SLT TECHNOLOGIES, INC.
- Current Assignee: SLT TECHNOLOGIES, INC.
- Current Assignee Address: US CA Los Angeles
- Agency: Patterson + Sheridan LLP
- Main IPC: C30B33/06
- IPC: C30B33/06 ; C30B7/10 ; H01L21/02 ; H01L29/20 ; C30B25/02 ; C30B25/18 ; C30B29/40 ; C30B19/06 ; C30B19/12

Abstract:
Techniques for processing materials in supercritical fluids including processing in a capsule disposed within a high-pressure apparatus enclosure are disclosed. The disclosed techniques are useful for growing crystals of GaN, AlN, InN, and their alloys, including InGaN, AlGaN, and AlInGaN for the manufacture of bulk or patterned substrates, which in turn can be used to make optoelectronic devices, lasers, light emitting diodes, solar cells, photoelectrochemical water splitting and hydrogen generation devices, photodetectors, integrated circuits, and transistors.
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