Invention Grant
- Patent Title: Field-effect transistors with asymmetric gate stacks
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Application No.: US16270826Application Date: 2019-02-08
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Publication No.: US11515424B2Publication Date: 2022-11-29
- Inventor: Said Rami , Hyung-Jin Lee , Saurabh Morarka , Guannan Liu , Qiang Yu , Bernhard Sell , Mark Armstrong
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Akona IP PC
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/51 ; H01L29/49 ; H01L29/423 ; H01L29/06 ; H01L29/66 ; H01L29/40 ; H01L29/08 ; H01L21/265 ; H01L29/165

Abstract:
Disclosed herein are field-effect transistors with asymmetric gate stacks. An example transistor includes a channel material and an asymmetric gate stack, provided over a portion of the channel material between source and drain (S/D) regions. The gate stack is asymmetric in that a thickness of a gate dielectric of a portion of the gate stack closer to one of the S/D regions is different from that of a portion of the gate stack closer to the other S/D region, and in that a work function (WF) material of a portion of the gate stack closer to one of the S/D regions is different from a WF material of a portion of the gate stack closer to the other S/D region. Transistors as described herein exploit asymmetry in the gate stacks to improve the transistor performance in terms of high breakdown voltage, high gain, and/or high output resistance.
Public/Granted literature
- US20200259018A1 FIELD-EFFECT TRANSISTORS WITH ASYMMETRIC GATE STACKS Public/Granted day:2020-08-13
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