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公开(公告)号:US20230420578A1
公开(公告)日:2023-12-28
申请号:US17848660
申请日:2022-06-24
申请人: Intel Corporation
发明人: Ayan Kar , Kalyan C. Kolluru , Nicholas A. Thomson , Vijaya Bhaskara Neeli , Said Rami , Saurabh Morarka , Karthik Krishaswamy , Mauro J. Kobrinsky
IPC分类号: H01L29/93 , H01L29/06 , H01L29/417
CPC分类号: H01L29/93 , H01L29/0673 , H01L29/417 , H01L29/42392
摘要: A varactor device includes a support structure, an electrically conductive layer at the backside of the support structure, two semiconductor structures including doped semiconductor materials, two contact structures, and a semiconductor region. Each contract structure is electrically conductive and is connected to a different one of the semiconductor structures A contract structure couples the corresponding semiconductor structure to the electrically conductive layer. The semiconductor region is between the two semiconductor structures and can be connected to the two semiconductor structures. The semiconductor region may include non-planar semiconductor structures coupled with a gate. The gate may be coupled to another electrically conductive layer at the frontside of the support structure. The varactor device may further include a pair of additional semiconductor regions that are electrically insulated from each other. The additional semiconductor regions may be coupled to two oppositely polarized gates, respectively.
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公开(公告)号:US11961836B2
公开(公告)日:2024-04-16
申请号:US16147205
申请日:2018-09-28
申请人: Intel Corporation
CPC分类号: H01L27/0808 , H01L29/66174 , H01L29/93 , H10B99/00
摘要: An integrated circuit structure comprises one or more fins extending above a surface of a substrate over an N-type well. A gate is over and in contact with the one or more fins. A second shallow N-type doping is below the gate and above the N-type well.
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公开(公告)号:US20230275124A1
公开(公告)日:2023-08-31
申请号:US17681263
申请日:2022-02-25
申请人: Intel Corporation
IPC分类号: H01L29/06 , H01L29/423 , H01L29/786 , H01L27/088
CPC分类号: H01L29/0673 , H01L29/42392 , H01L29/78618 , H01L29/78696 , H01L27/088
摘要: Techniques are provided herein to form semiconductor devices having epitaxial diffusion regions (e.g., source and/or drain regions) wrapped by a conductive contact. In an example, a semiconductor device includes a source or drain region and a conductive layer that extends around the source or drain region such that the conductive layer at least contacts the sidewalls of the source or drain region or wraps completely around the source or drain region. In some examples, a conducive contact extends upward through a thickness of an adjacent dielectric layer and contacts the conductive layer from below, thus forming a backside contact. By forming a conductive layer around multiple sides of the source or drain region (rather than just contacting a top or bottom surface) more surface area of the source or drain region is contacted thus providing an improved ohmic contact and a lower overall contact resistance.
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公开(公告)号:US11417781B2
公开(公告)日:2022-08-16
申请号:US16830112
申请日:2020-03-25
申请人: Intel Corporation
发明人: Ayan Kar , Saurabh Morarka , Carlos Nieva-Lozano , Kalyan Kolluru , Biswajeet Guha , Chung-Hsun Lin , Brian Greene , Tahir Ghani
摘要: Gate-all-around integrated circuit structures including varactors are described. For example, an integrated circuit structure includes a varactor structure on a semiconductor substrate. The varactor structure includes a plurality of discrete vertical arrangements of horizontal nanowires. A plurality of gate stacks is over and surrounding corresponding ones of the plurality of discrete vertical arrangements of horizontal nanowires. The integrated circuit structure also includes a tap structure adjacent to the varactor structure on the semiconductor substrate. The tap structure includes a plurality of merged vertical arrangements of horizontal nanowires. A plurality of semiconductor structures is over and surrounding corresponding ones of the plurality of merged vertical arrangements of horizontal nanowires.
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公开(公告)号:US11411110B2
公开(公告)日:2022-08-09
申请号:US17499605
申请日:2021-10-12
申请人: Intel Corporation
摘要: Methods of forming a strained channel device utilizing dislocations disposed in source/drain structures are described. Those methods and structures may include forming a thin silicon germanium material in a source/drain opening of a device comprising silicon, wherein multiple dislocations are formed in the silicon germanium material. A source/drain material may be formed on the thin silicon germanium material, wherein the dislocations induce a tensile strain in a channel region of the device.
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公开(公告)号:US20220238714A1
公开(公告)日:2022-07-28
申请号:US17723582
申请日:2022-04-19
申请人: Intel Corporation
摘要: Methods of forming a strained channel device utilizing dislocations disposed in source/drain structures are described. Those methods and structures may include forming a thin silicon germanium material in a source/drain opening of a device comprising silicon, wherein multiple dislocations are formed in the silicon germanium material. A source/drain material may be formed on the thin silicon germanium material, wherein the dislocations induce a tensile strain in a channel region of the device.
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公开(公告)号:US20200259018A1
公开(公告)日:2020-08-13
申请号:US16270826
申请日:2019-02-08
申请人: Intel Corporation
发明人: Said Rami , Hyung-Jin Lee , Saurabh Morarka , Guannan Liu , Qiang Yu , Bernhard Sell , Mark Armstrong
IPC分类号: H01L29/78 , H01L29/51 , H01L29/49 , H01L29/423 , H01L29/06 , H01L29/08 , H01L29/66 , H01L29/40
摘要: Disclosed herein are field-effect transistors with asymmetric gate stacks. An example transistor includes a channel material and an asymmetric gate stack, provided over a portion of the channel material between source and drain (S/D) regions. The gate stack is asymmetric in that a thickness of a gate dielectric of a portion of the gate stack closer to one of the S/D regions is different from that of a portion of the gate stack closer to the other S/D region, and in that a work function (WF) material of a portion of the gate stack closer to one of the S/D regions is different from a WF material of a portion of the gate stack closer to the other S/D region. Transistors as described herein exploit asymmetry in the gate stacks to improve the transistor performance in terms of high breakdown voltage, high gain, and/or high output resistance.
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公开(公告)号:US10396201B2
公开(公告)日:2019-08-27
申请号:US14912594
申请日:2013-09-26
申请人: Intel Corporation
摘要: Methods of forming a strained channel device utilizing dislocations disposed in source/drain structures are described. Those methods and structures may include forming a thin silicon germanium material in a source/drain opening of a device comprising silicon, wherein multiple dislocations are formed in the silicon germanium material. A source/drain material may be formed on the thin silicon germanium material, wherein the dislocations induce a tensile strain in a channel region of the device.
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公开(公告)号:US11869987B2
公开(公告)日:2024-01-09
申请号:US17860056
申请日:2022-07-07
申请人: Intel Corporation
发明人: Ayan Kar , Saurabh Morarka , Carlos Nieva-Lozano , Kalyan Kolluru , Biswajeet Guha , Chung-Hsun Lin , Brian Greene , Tahir Ghani
CPC分类号: H01L29/93 , H01L21/02532 , H01L21/02603 , H01L29/0673 , H01L29/66174
摘要: Gate-all-around integrated circuit structures including varactors are described. For example, an integrated circuit structure includes a varactor structure on a semiconductor substrate. The varactor structure includes a plurality of discrete vertical arrangements of horizontal nanowires. A plurality of gate stacks is over and surrounding corresponding ones of the plurality of discrete vertical arrangements of horizontal nanowires. The integrated circuit structure also includes a tap structure adjacent to the varactor structure on the semiconductor substrate. The tap structure includes a plurality of merged vertical arrangements of horizontal nanowires. A plurality of semiconductor structures is over and surrounding corresponding ones of the plurality of merged vertical arrangements of horizontal nanowires.
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公开(公告)号:US20230299135A1
公开(公告)日:2023-09-21
申请号:US17697129
申请日:2022-03-17
申请人: Intel Corporation
IPC分类号: H01L29/06 , H01L29/423 , H01L29/786 , H01L29/66 , H01L27/088
CPC分类号: H01L29/0665 , H01L29/42392 , H01L29/78618 , H01L29/78696 , H01L29/6656 , H01L27/0886
摘要: Techniques are provided herein to form an integrated circuit having any number of partial gate cut structures between adjacent semiconductor devices. Neighboring semiconductor devices each include a semiconductor region extending between a source region and a drain region, and a gate structure extending over the semiconductor regions of the neighboring semiconductor devices. In some such examples, a partial gate cut structure is present between a given pair of neighboring semiconductor devices. The partial gate cut structure acts as a dielectric pillar between the semiconductor structures that allows the conductive gate layer (from the gate structure) to extend above and/or below it such that the gates of each of the semiconductor devices remain electrically coupled together. The gate cut structure itself removes a portion of the gate layer from between the semiconductor devices, thus reducing parasitic capacitance.
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