Invention Grant
- Patent Title: Field effect transistor with enhanced reliability
-
Application No.: US17325576Application Date: 2021-05-20
-
Publication No.: US11658234B2Publication Date: 2023-05-23
- Inventor: Kyle Bothe , Terry Alcorn , Dan Namishia , Jia Guo , Matt King , Saptharishi Sriram , Jeremy Fisher , Fabian Radulescu , Scott Sheppard , Yueying Liu
- Applicant: Wolfspeed, Inc.
- Applicant Address: US NC Durham
- Assignee: Wolfspeed, Inc.
- Current Assignee: Wolfspeed, Inc.
- Current Assignee Address: US NC Durham
- Agency: Sage Patent Group
- Main IPC: H01L29/778
- IPC: H01L29/778 ; H01L29/66 ; H01L29/40

Abstract:
A transistor device includes a semiconductor epitaxial layer structure including a channel layer and a barrier layer on the channel layer, a source contact and a drain contact on the barrier layer, an insulating layer on the semiconductor layer between the source contact and the drain contact, and a gate contact on the insulating layer. The gate contact includes a central portion that extends through the insulating layer and contacts the barrier layer and a drain side wing that extends laterally from the central portion of the gate toward the drain contact by a distance ΓD. The drain side wing of the gate contact is spaced apart from the barrier layer by a distance d1 that is equal to a thickness of the insulating layer. The distance ΓD is less than about 0.3 μm, and the distance d1 is less than about 80 nm.
Public/Granted literature
- US20220130985A1 FIELD EFFECT TRANSISTOR WITH ENHANCED RELIABILITY Public/Granted day:2022-04-28
Information query
IPC分类: