- 专利标题: Semiconductor device and method of forming micro interconnect structures
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申请号: US17082512申请日: 2020-10-28
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公开(公告)号: US11710691B2公开(公告)日: 2023-07-25
- 发明人: Francis J. Carney , Jefferson W. Hall , Michael J. Seddon
- 申请人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 申请人地址: US AZ Phoenix
- 专利权人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 当前专利权人: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- 当前专利权人地址: US AZ Scottsdale
- 代理机构: Adam R. Stephenson, Ltd.
- 分案原申请号: US16131462 2018.09.14
- 主分类号: H01L23/498
- IPC分类号: H01L23/498 ; H01L23/495 ; H01L21/48 ; H01L23/00 ; H01L21/3065 ; H01L21/78 ; H01L21/67 ; H01L21/66 ; H01L21/56 ; H01L23/31 ; H02M3/158 ; H01L23/482 ; H01L25/065 ; H01L25/00 ; H01L23/544 ; H01L21/02 ; H01L21/304 ; H01L21/308 ; H01L27/146 ; H01L21/288 ; H01L21/683 ; H01L21/768 ; H01L23/48 ; H01L27/02 ; H01L27/088 ; H01L27/14 ; H01L29/08 ; H01L23/15 ; H01L23/367 ; H01L23/14
摘要:
A semiconductor device has a first semiconductor die and second semiconductor die with a conductive layer formed over the first semiconductor die and second semiconductor die. The second semiconductor die is disposed adjacent to the first semiconductor die with a side surface and the conductive layer of the first semiconductor die contacting a side surface and the conductive layer of the second semiconductor die. An interconnect, such as a conductive material, is formed across a junction between the conductive layers of the first and second semiconductor die. The conductive layer may extend down the side surface of the first semiconductor die and further down the side surface of the second semiconductor die. An extension of the side surface of the first semiconductor die can interlock with a recess of the side surface of the second semiconductor die. The conductive layer extends over the extension and into the recess.
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