Invention Grant
- Patent Title: Chip protected against back-face attacks
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Application No.: US17451718Application Date: 2021-10-21
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Publication No.: US12087708B2Publication Date: 2024-09-10
- Inventor: Sebastien Petitdidier , Nicolas Hotellier , Raul Andres Bianchi , Alexis Farcy , Benoit Froment
- Applicant: STMicroelectronics (Crolles 2) SAS
- Applicant Address: FR Crolles
- Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee: STMicroelectronics (Crolles 2) SAS
- Current Assignee Address: FR Crolles
- Agency: Slater Matsil, LLP
- Priority: FR 58070 2016.08.31
- The original application number of the division: US15638883 2017.06.30
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L21/311 ; H01L21/768 ; H01L23/29 ; H01L23/31 ; H01L23/48 ; H01L23/498 ; H01L23/522 ; H01L23/528 ; H01L23/58 ; H01L23/64 ; H03K3/3565

Abstract:
A method for fabricating a semiconductor chip includes forming a plurality of conducting pads at a front face of a substrate, thinning a rear face of the substrate, etching openings under each conducting pad from the rear face, depositing a layer of a dielectric on walls and a bottom of the openings, forming a conducting material in the openings, and forming a conducting strip on the rear face. The conducting strip is electrically connected to the conducting material of each of the openings. The etching is stopped when the respective conducting pad is reached.
Information query
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