Invention Application
US20050196254A1 Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
有权
真空泵送系统，其驱动方法，具有该真空泵系统的装置，以及使用其的基板的转移方法
- Patent Title: Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
- Patent Title (中): 真空泵送系统，其驱动方法，具有该真空泵系统的装置，以及使用其的基板的转移方法
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Application No.: US11076512Application Date: 2005-03-08
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Publication No.: US20050196254A1Publication Date: 2005-09-08
- Inventor: Hong-Seub Kim , Hyun-Soo Park , Soon-Bin Jung , Sung-Ho Cha , Dong-Jin Kim , Wook-Jung Hwang , Jin-Hyuk Yoo
- Applicant: Hong-Seub Kim , Hyun-Soo Park , Soon-Bin Jung , Sung-Ho Cha , Dong-Jin Kim , Wook-Jung Hwang , Jin-Hyuk Yoo
- Applicant Address: KR Kwangju-shi
- Assignee: JUSUNG Engineering Co., Ltd.
- Current Assignee: JUSUNG Engineering Co., Ltd.
- Current Assignee Address: KR Kwangju-shi
- Priority: JP2004-15544 20040308; JP2004-17627 20040316; JP2004-17832 20040317; JP2005-14819 20050223
- Main IPC: B65G1/00
- IPC: B65G1/00 ; C23C16/00 ; F04D17/10 ; G02F1/133 ; H01L21/00
Abstract:
An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.
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