发明申请
US20100067653A1 OPTICAL ELEMENT FOR RADIATION IN THE EUV AND/OR SOFT X-RAY REGION AND AN OPTICAL SYSTEM WITH AT LEAST ONE OPTICAL ELEMENT
有权
在欧盟和/或软X射线区域辐射的光学元件和具有至少一个光学元件的光学系统
- 专利标题： OPTICAL ELEMENT FOR RADIATION IN THE EUV AND/OR SOFT X-RAY REGION AND AN OPTICAL SYSTEM WITH AT LEAST ONE OPTICAL ELEMENT
- 专利标题（中）： 在欧盟和/或软X射线区域辐射的光学元件和具有至少一个光学元件的光学系统
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申请号： US12625336申请日： 2009-11-24
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公开(公告)号： US20100067653A1公开(公告)日： 2010-03-18
- 发明人: Marco Wedowski , Markus Weiss , Stephan Mûllender , Johann Trenkler , Hartmut Enkisch , Gisela Sipos , H.A. van Mierlo , Michiel David Nijkerk , Fokko Pieter Wieringa , Nadyeh Shariloo
- 申请人： Marco Wedowski , Markus Weiss , Stephan Mûllender , Johann Trenkler , Hartmut Enkisch , Gisela Sipos , H.A. van Mierlo , Michiel David Nijkerk , Fokko Pieter Wieringa , Nadyeh Shariloo
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss SMT AG
- 当前专利权人： Carl Zeiss SMT AG
- 当前专利权人地址： DE Oberkochen
- 主分类号： G21K1/06
- IPC分类号： G21K1/06 ; A61N5/06 ; G01J1/42
摘要：
An optical element, especially a normal-incidence collector mirror, for radiation in the EUV and/or soft X-ray region of wavelengths is described. The element has a substrate, a multilayer coating with an optically active region, and a capacitor, having a first and a second capacitor electrode. At least one layer of the multilayer coating serves as the first capacitor electrode. At least one dielectric layer is provided between the two capacitor electrodes. Also described is an optical system with at least one optical element, having a first electrode arranged in the vicinity of the optical element.
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