摘要:
An optical element, especially a normal-incidence collector mirror, for radiation in the EUV and/or soft X-ray region of wavelengths is described. The element has a substrate, a multilayer coating with an optically active region, and a capacitor, having a first and a second capacitor electrode. At least one layer of the multilayer coating serves as the first capacitor electrode. At least one dielectric layer is provided between the two capacitor electrodes. Also described is an optical system with at least one optical element, having a first electrode arranged in the vicinity of the optical element.
摘要:
An optical element, especially a normal-incidence collector mirror, for radiation in the EUV and/or soft X-ray region of wavelengths is described. The element has a substrate, a multilayer coating with an optically active region, and a capacitor, having a first and a second capacitor electrode. At least one layer of the multilayer coating serves as the first capacitor electrode. At least one dielectric layer is provided between the two capacitor electrodes. Also described is an optical system with at least one optical element, having a first electrode arranged in the vicinity of the optical element.
摘要:
An optical element, especially a normal-incidence collector mirror, for radiation in the EUV and/or soft X-ray region of wavelengths is described. The element has a substrate, a multilayer coating with an optically active region, and a capacitor, having a first and a second capacitor electrode. At least one layer of the multilayer coating serves as the first capacitor electrode. At least one dielectric layer is provided between the two capacitor electrodes. Also described is an optical system with at least one optical element, having a first electrode arranged in the vicinity of the optical element.
摘要:
The invention relates to an ionization chamber (10) comprising an inner spherical electrode (2), an outer spherical electrode (4), a space between the inner spherical electrode and the outer spherical electrode, and a resistive hollow body (3) provided in the said space, wherein electrical connections to the inner spherical electrode and electrical connection to the top of the resistive hollow body (3) are electrostatically shielded by that same resistive hollow body having a continuously varied local resistance along its axis. The invention further relates to a method of manufacturing an ionization chamber.
摘要:
A method of obtaining an image of buried structures in an object, comprising: providing a camera for imaging visual and infrared-images; providing a bounded light source; partly irradiating said object by said bounded light source; imaging a non-irradiated area of said object by said camera to image said buried structure; and combining said buried structure image with a visual image of said object. Accordingly an image can be obtained while discarding specular reflections of the object. Additionally there is disclosed a method of enhancing imaging of buried structures in an object, comprising: aligning said infrared light source with a visual light source; providing a first edge analysis of said infrared image; providing a second edge analysis of said visual image; comparing said first and second edge analysis; and discarding edges in said infrared image that are also detected in said second image.
摘要:
The invention relates to a plasma generator (1) for cleaning an object. The plasma generator (1) comprises a plasma chamber (2) and a support structure (6) arranged in the plasma chamber for supporting the object (7) to be cleaned. Further, the plasma generator comprises an electromagnetic shield (5a, 5b, 5c) counteracting a flow of charged plasma particles flowing from a plasma generating region towards the object, and a plasma source (8). In addition, the plasma generator comprises an additional plasma source (9,10) to form a composition of plasma sources that are arranged to generate in the plasma generating region plasmas, respectively, that mutually interact during operation of the plasma generator so as to force plasma particles to flow in a diffusely closed flow path.
摘要:
The invention relates to a radiation dose meter for measuring radiation dose in a strong external magnetic field (100 m T-10 T) by means of charged particles generated in the radiation dose meter, the radiation dose meter provided with an alignment unit capable of auto aligning the radiation dose meter in the external magnetic field so that a path of the said charged particles inside the radiation dose meter is substantially parallel to a direction of the external magnetic field.
摘要:
The invention relates to a method of cleaning and/or sterilization of an object provided in a hermetically sealed enclosure, providing a pressure difference between an internal volume of the enclosure and surroundings and generating a plasma solely inside the enclosure for said cleaning and/or sterilization of the object. The invention further relates to an apparatus for enabling the same. The apparatus 10 comprises a vacuum chamber 1, which can be evacuated using a vacuum pump 2, and a source 3 arranged to generate plasma of a suitable gas in an enclosure 8, which is substantially hermetically closed with respect to the atmosphere of the vacuum chamber. The enclosure 8 may be of a flexible type or may be manufactured from a rigid material. In case when the enclosure is rigid the pressure inside the enclosure may be lower than an outside pressure.
摘要:
The invention relates to a method of cleaning and/or sterilization of an object provided in a hermetically sealed enclosure, providing a pressure difference between an internal volume of the enclosure and surroundings and generating a plasma solely inside the enclosure for said cleaning and/or sterilization of the object. The invention further relates to an apparatus for enabling the same. The apparatus 10 comprises a vacuum chamber 1, which can be evacuated using a vacuum pump 2, and a source 3 arranged to generate plasma of a suitable gas in an enclosure 8, which is substantially hermetically closed with respect to the atmosphere of the vacuum chamber. The enclosure 8 may be of a flexible type or may be manufactured from a rigid material. In case when the enclosure is rigid the pressure inside the enclosure may be lower than an outside pressure.
摘要:
The invention relates to a system for inspection of a three-dimensional environment by a user, comprising a tool (3) arranged to be introduced in a vicinity of the three-dimensional environment (1), said tool comprising one or more cameras (4) arranged at or near a distal end of the tool, said one or more cameras being arranged to generate respective images of the three-dimensional environment; a display unit (8) arranged to receive said respective images; a motion tracking system (11) arranged to determine a position of at least a portion of the user for selecting an image generated by said cameras or for causing the one or more cameras to generate the image on demand and for displaying the image (9) on the display (8). The invention further relates to a method, a tool, a display unit for enabling inspection of an object by a user as well as to use of a tool comprising at least one camera in the system as set forth in the foregoing.