Invention Application
- Patent Title: NON-SHADOW FRAME PLASMA PROCESSING CHAMBER
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Application No.: US15157076Application Date: 2016-05-17
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Publication No.: US20170335459A1Publication Date: 2017-11-23
- Inventor: Young-jin CHOI , Beom Soo PARK , Dongsuh LEE , William Norman STERLING , Robin L. TINER , Shinichi KURITA , Suhail ANWAR , Soo Young CHOI , Yi CUI , Lia ZHAO , Dapeng WANG
- Applicant: Applied Materials, Inc.
- Main IPC: C23C16/50
- IPC: C23C16/50 ; C23C16/40 ; C23C16/458 ; H01L21/687 ; H01L21/285 ; H01L21/02
Abstract:
Embodiments described herein generally relate to a substrate support assembly. The substrate support assembly includes a support plate and a ceramic layer. The support plate has a top surface. The top surface includes a substrate receiving area configured to support a large area substrate and an outer area located outward of the substrate receiving area.
Information query
IPC分类:
