Invention Application
- Patent Title: PROTECTIVE LINER LAYERS IN 3D MEMORY STRUCTURE
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Application No.: US17190735Application Date: 2021-03-03
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Publication No.: US20220285384A1Publication Date: 2022-09-08
- Inventor: Tsu Ching Yang , Sheng-Chih Lai , Yu-Wei Jiang , Kuo-Chang Chiang , Hung-Chang Sun , Chen-Jun Wu , Feng-Cheng Yang , Chung-Te Lin
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Main IPC: H01L27/11578
- IPC: H01L27/11578 ; H01L27/11568 ; H01L27/1159 ; H01L27/11597

Abstract:
A memory device includes a stack of gate electrode layers and interconnect layers arranged over a substrate. A first memory cell that is arranged over the substrate includes a first source/drain conductive lines and a second source/drain conductive line extending vertically through the stack of gate electrode layers. A channel layer and a memory layer are arranged on outer sidewalls of the first and second source/drain conductive lines. A first barrier structure is arranged between the first and second source/drain conductive lines. A first protective liner layer separates the first barrier structure from each of the first and second source/drain conductive lines. A second barrier structure is arranged on an opposite side of the first source/drain conductive line and is spaced apart from the first source/drain conductive line by a second protective liner layer.
Public/Granted literature
- US11723199B2 Protective liner layers in 3D memory structure Public/Granted day:2023-08-08
Information query
IPC分类: