Invention Application
- Patent Title: TRANSISTOR CIRCUITS INCLUDING FRINGELESS TRANSISTORS AND METHOD OF MAKING THE SAME
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Application No.: US17316015Application Date: 2021-05-10
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Publication No.: US20220359690A1Publication Date: 2022-11-10
- Inventor: Dai IWATA , Hiroshi NAKATSUJI , Hiroyuki OGAWA , Eiichi FUJIKURA
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX ADDISON
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX ADDISON
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/66 ; H01L27/07 ; H01L21/8238 ; H01L29/40

Abstract:
A field effect transistor includes a gate dielectric and a gate electrode overlying an active region and contacting a sidewall of a trench isolation structure. The transistor may be a fringeless transistor in which the gate electrode does not overlie a portion of the trench isolation region. A planar dielectric spacer plate and a conductive gate cap structure may overlie the gate electrode. The conductive gate cap structure may have a z-shaped vertical cross-sectional profile to contact the gate electrode and to provide a segment overlying the planar dielectric spacer plate. Alternatively or additionally, a conductive gate connection structure may be provided to provide electrical connection between two electrodes of adjacent field effect transistors.
Public/Granted literature
- US12094944B2 Transistor circuits including fringeless transistors and method of making the same Public/Granted day:2024-09-17
Information query
IPC分类: