发明公开
- 专利标题: INTEGRATED CONFORMAL THERMAL HEAT SPREADER FOR MULTICHIP COMPOSITE DEVICES
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申请号: US17891727申请日: 2022-08-19
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公开(公告)号: US20240063076A1公开(公告)日: 2024-02-22
- 发明人: Mohammad Enamul Kabir , Bhaskar Jyoti Krishnatreya , Kimin Jun , Adel Elsherbini , Tushar Talukdar , Feras Eid , Debendra Mallik , Krishna Vasanth Valavala , Xavier Brun
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L23/367
- IPC分类号: H01L23/367 ; H01L23/00 ; H01L23/373 ; H01L23/48 ; H01L25/065
摘要:
Microelectronic devices, assemblies, and systems include a multichip composite device having one or more integrated circuit dies bonded to a base die, a conformal thermal heat spreading layer on the top and sidewalls of the integrated circuit dies, and an inorganic dielectric material on a portion of the conformal thermal heat spreading layer, laterally adjacent the integrated circuit dies, and over the base die. The conformal thermal heat spreading layer includes a high thermal conductivity material to provide a thermal pathway for the integrated circuit dies during operation.
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