Invention Publication
- Patent Title: MEMORY DEVICE CONTAINING COMPOSITION-CONTROLLED FERROELECTRIC MEMORY ELEMENTS AND METHOD OF MAKING THE SAME
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Application No.: US17821012Application Date: 2022-08-19
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Publication No.: US20240064992A1Publication Date: 2024-02-22
- Inventor: Rahul SHARANGPANI , Kartik SONDHI , Raghuveer S. MAKALA , Tiffany SANTOS , Fei ZHOU , Joyeeta NAG , Bhagwati PRASAD
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX ADDISON
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX ADDISON
- Main IPC: H01L27/11597
- IPC: H01L27/11597 ; H01L27/11587 ; H01L29/66 ; H01L29/78

Abstract:
A semiconductor memory device includes an alternating stack of insulating layers and electrically conductive layers, a memory opening vertically extending through the alternating stack, and a memory opening fill structure located in the memory opening and including a vertical stack of discrete ferroelectric material portions and a vertical semiconductor channel. In one embodiment, the discrete ferroelectric material portions include a ferroelectric alloy material of a first dielectric metal oxide material and a second dielectric metal oxide material. In another embodiment, each of the discrete ferroelectric material portions is oxygen-deficient.
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