- 专利标题: GATE CUT AND FIN TRIM ISOLATION FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABRICATION
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申请号: US18732393申请日: 2024-06-03
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公开(公告)号: US20240332399A1公开(公告)日: 2024-10-03
- 发明人: Tahir GHANI , Byron HO , Michael L. HATTENDORF , Christopher P. AUTH
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 分案原申请号: US16386202 2019.04.16
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L21/02 ; H01L21/033 ; H01L21/28 ; H01L21/285 ; H01L21/308 ; H01L21/311 ; H01L21/762 ; H01L21/768 ; H01L21/8234 ; H01L21/8238 ; H01L23/00 ; H01L23/522 ; H01L23/528 ; H01L23/532 ; H01L27/02 ; H01L27/088 ; H01L27/092 ; H01L29/06 ; H01L29/08 ; H01L29/165 ; H01L29/167 ; H01L29/417 ; H01L29/51 ; H01L29/78 ; H10B10/00
摘要:
Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, a method includes forming a plurality of fins and forming a plurality of gate structures over the plurality of fins. A dielectric material structure is formed between adjacent ones of the plurality of gate structures. A portion of a first of the plurality of gate structures is removed to expose a first portion of each of the plurality of fins, and a portion of a second of the plurality of gate structures is removed to expose a second portion of each of the plurality of fins. The exposed first portion of each of the plurality of fins is removed, but the exposed second portion of each of the plurality of fins is not removed.
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