发明授权
US5601740A Method and apparatus for wirebonding, for severing bond wires, and for
forming balls on the ends of bond wires
失效
用于引线接合的方法和装置,用于切断接合线,以及在接合线的端部上形成球
- 专利标题: Method and apparatus for wirebonding, for severing bond wires, and for forming balls on the ends of bond wires
- 专利标题(中): 用于引线接合的方法和装置,用于切断接合线,以及在接合线的端部上形成球
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申请号: US573945申请日: 1995-12-18
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公开(公告)号: US5601740A公开(公告)日: 1997-02-11
- 发明人: Benjamin N. Eldridge , Gaetan L. Mathieu
- 申请人: Benjamin N. Eldridge , Gaetan L. Mathieu
- 申请人地址: CA Livermore
- 专利权人: Formfactor, Inc.
- 当前专利权人: Formfactor, Inc.
- 当前专利权人地址: CA Livermore
- 主分类号: B23K20/00
- IPC分类号: B23K20/00 ; C23C18/16 ; C25D5/08 ; C25D5/22 ; C25D7/12 ; C25D21/02 ; G01R1/04 ; G01R1/067 ; G01R1/073 ; G01R31/28 ; H01L21/00 ; H01L21/48 ; H01L21/56 ; H01L21/60 ; H01L21/603 ; H01L21/66 ; H01L23/48 ; H01L23/485 ; H01L23/49 ; H01L23/498 ; H01L25/065 ; H01L25/16 ; H05K1/14 ; H05K3/20 ; H05K3/30 ; H05K3/32 ; H05K3/34 ; H05K3/36 ; H05K3/40 ; H05K7/10 ; B23K9/06
摘要:
The efficacy of electrical discharges for severing bond wires and/or for forming balls at the ends of bond wires (including bond wires already severed by alternative mechanisms) is improved by performing the electrical discharges in the presence of ultraviolet light. A "spark gap" is formed between an EFO electrode and the wire, one of which serves as the cathode of the spark gap. Preferably, the ultraviolet light is directed at the element serving as the cathode of the spark gap. Providing photoemission at the cathode element of the spark gap stabilizes arc/plasma formation and produces more reliable and predictable results. This technique may be used in conjunction with negative EFO systems or with positive EFO systems, and may benefit from either direct or field-assisted photoemission.
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