- 专利标题： Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like
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申请号： US138628申请日： 1998-08-24
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公开(公告)号： US6069080A公开(公告)日： 2000-05-30
- 发明人: David B. James , William D. Budinger , John V. H. Roberts , Michael R. Oliver , Nina G. Chechik , Richard M. Levering, Jr. , Heinz F. Reinhardt
- 申请人： David B. James , William D. Budinger , John V. H. Roberts , Michael R. Oliver , Nina G. Chechik , Richard M. Levering, Jr. , Heinz F. Reinhardt
- 申请人地址： DE Wilimington
- 专利权人： Rodel Holdings, Inc.
- 当前专利权人： Rodel Holdings, Inc.
- 当前专利权人地址： DE Wilimington
- 主分类号： B24B37/26
- IPC分类号： B24B37/26 ; B24B41/047 ; B24B53/00 ; B24B53/007 ; B24B53/017 ; B24D3/28 ; B24D3/32 ; B24D3/34 ; B24D13/10 ; B24D13/14 ; B29C70/58 ; B29C70/66 ; C08J5/14 ; G11B23/00 ; H01L21/304 ; H01L21/306 ; H01L21/3105 ; H01L21/302
摘要：
A fixed abrasive, chemical-mechanical polishing system which is particularly well suited for use in the manufacture of semiconductor devices, memory disks or the like.
公开/授权文献
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