发明授权
- 专利标题: Optical coupling structures and the fabrication processes
- 专利标题(中): 光耦合结构和制造工艺
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申请号: US09853449申请日: 2001-05-09
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公开(公告)号: US06684007B2公开(公告)日: 2004-01-27
- 发明人: Tetsuzo Yoshimura , Yasuhito Takahashi , James Roman , Mark Thomas McCormack , Solomon I. Beilin , Wen-chou Vincent Wang , Masaaki Inao
- 申请人: Tetsuzo Yoshimura , Yasuhito Takahashi , James Roman , Mark Thomas McCormack , Solomon I. Beilin , Wen-chou Vincent Wang , Masaaki Inao
- 主分类号: G02B626
- IPC分类号: G02B626
摘要:
An optical apparatus including an optical substrate having an embedded waveguide and an optical device adapted to receive light transmitted from an end of the waveguide. The optical apparatus includes a coupling structure for coupling the optical device to the substrate. The coupling structure has a thin metallic layer with an aperture. At least a portion of the optical device is disposed in the aperture. A method for making an optical apparatus comprising forming an optical substrate having a waveguide embedded therein; depositing a metal layer over an end of the waveguide; and depositing a polymeric layer over the metal layer. An aperture is formed in the metal layer and in the polymeric layer by removing a portion of the metal layer and a portion of the polymeric layer disposed over the end of the waveguide. The method for making an optical apparatus also comprises inserting at least a portion of an optical device within the aperture so that the optical device is positioned to receive light from the first end of the waveguide.
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