DIELECTRIC TRENCHES, NICKEL/TANTALUM OXIDE STRUCTURES, AND CHEMICAL MECHANICAL POLISHING TECHNIQUES
    1.
    发明申请
    DIELECTRIC TRENCHES, NICKEL/TANTALUM OXIDE STRUCTURES, AND CHEMICAL MECHANICAL POLISHING TECHNIQUES 有权
    电介质,镍/氧化钛结构和化学机械抛光技术

    公开(公告)号:US20080025009A1

    公开(公告)日:2008-01-31

    申请号:US11866186

    申请日:2007-10-02

    IPC分类号: H05K7/02

    摘要: A portion of a conductive layer (310, 910) provides a capacitor electrode (310.0, 910.0). Dielectric trenches (410, 414, 510) are formed in the conductive layer to insulate the capacitor electrode from those portions of the conductive layer which are used for conductive paths passing through the electrode but insulated from the electrode. Capacitor dielectric (320) can be formed by anodizing tantalum while a nickel layer (314) protects an underlying copper (310) from the anodizing solution. This protection allows the tantalum layer to be made thin to obtain large capacitance. Chemical mechanical polishing of a layer (610) is made faster, and hence possibly less expensive, by first patterning the layer photolithographically to form, and/or increase in height, upward protrusions of this layer.

    摘要翻译: 导电层(310,910)的一部分提供电容器电极(310.0,910.0)。 电介质沟槽(410,414,510)形成在导电层中,以将电容器电极与用于穿过电极但与电极绝缘的导电路径的导电层的那些部分绝缘。 可以通过阳极氧化钽形成电容器电介质(320),同时镍层(314)保护底层铜(310)与阳极氧化溶液。 该保护允许使钽层变薄以获得大的电容。 通过首先对该层进行光刻图案化以形成和/或增加该层的向上突起,使层(610)的化学机械抛光更快,因此可能更便宜。

    Metal gasket with cold formed stopper
    4.
    发明授权
    Metal gasket with cold formed stopper 有权
    带冷成型止动件的金属垫片

    公开(公告)号:US07059609B1

    公开(公告)日:2006-06-13

    申请号:US09592969

    申请日:2000-06-13

    IPC分类号: F02F11/00

    摘要: A multilayer metal gasket has a pair of outer active layers separated by an intermediate layer. The outer active layers are formed with at least one pair of aligned apertures and sealing beads surrounding the apertures in radially outwardly spaced relation thereto presenting laterally opposed sealing surfaces of the active layers of predetermined spacing or thickness when the gasket is in a compressed free state. The intermediate layer extends radially inwardly beyond the apertures and is provided with a cold formed stopper portion having a thickness greater than the combined material thicknesses of the intermediate layer and outer active layers but less than the thickness of the sealing beads. The stopper portion is cold formed under a compressive load exceeding the compressive load required to deform the sealing beads beyond their elastic limit, thereby preventing irreversible damage to the sealing beads. The stopper portion presents opposing sealing surfaces which, when the gasket is clamped between two members having a passage to be sealed, serves as a primary seal or fire dam, shielding the sealing beads of the outer active layers from direct exposure to the heat of any fluid in the passage, such as hot exhaust gases of an internal combustion engine.

    摘要翻译: 多层金属垫片具有由中间层隔开的一对外部活性层。 外部有源层形成有至少一对对齐的孔和围绕这些孔径的向外间隔的关系的密封珠,当衬垫处于压缩自由状态时,其具有预定间隔或厚度的有源层的横向相对的密封表面。 中间层径向向内延伸超过孔,并且设置有具有大于中间层和外部活性层的组合材料厚度但小于密封珠的厚度的厚度的冷成型止挡部分。 止动部分在超过超过其弹性极限使密封珠变形所需的压缩载荷的压缩载荷下冷成型,从而防止密封珠的不可逆损坏。 止动部分呈现相对的密封表面,当垫圈被夹紧在具有待密封通道的两个构件之间时,该密封表面用作初级密封或防火堤,屏蔽外部活性层的密封珠直接暴露于任何 通道中的流体,例如内燃机的热废气。

    Optical switching apparatus and method for fabricating
    7.
    发明授权
    Optical switching apparatus and method for fabricating 失效
    光开关装置及其制造方法

    公开(公告)号:US06898343B2

    公开(公告)日:2005-05-24

    申请号:US09932526

    申请日:2001-08-17

    CPC分类号: G02F1/31

    摘要: A hybrid integration process for fabrication of an optical cross-connect switching apparatus. The switching element is based on the deflection of light beam in electro-optic materials by applying electric field across electrodes of an appropriate configuration. The integration process includes fabrication of a substrate (e.g. silicon substrate) with 2D imaging optics from polymeric materials (or silica), fabrication of the light deflecting element, and assembly of the deflecting element on the substrate with imaging optics. The fabrication of the light deflecting element includes fabrication of a LN (lithium niobate) block. The LN block assembled in an optical switching apparatus includes a two-dimensional waveguide formed on a surface of the LN block and an electrode on a surface of the LN block.

    摘要翻译: 一种用于制造光交叉连接开关装置的混合集成方法。 开关元件基于通过在适当配置的电极上施加电场而在光电材料中的光束的偏转。 整合过程包括使用来自聚合材料(或二氧化硅)的2D成像光学器件制造衬底(例如硅衬底),制造光偏转元件,以及使用成像光学器件将偏转元件组装在衬底上。 光偏转元件的制造包括制造LN(铌酸锂)块。 组装在光开关装置中的LN块包括形成在LN块表面上的二维波导和LN块表面上的电极。