发明授权
- 专利标题： Device having capacitor and its manufacture
- 专利标题（中）： 具有电容器及其制造的装置
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申请号： US10647246申请日： 2003-08-26
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公开(公告)号： US06943397B2公开(公告)日： 2005-09-13
- 发明人: Masao Kondo , Hideki Yamawaki , Kenji Maruyama , Kazuaki Kurihara , Masaharu Hida , Shigeyoshi Umemiya , Masaki Kurasawa
- 申请人： Masao Kondo , Hideki Yamawaki , Kenji Maruyama , Kazuaki Kurihara , Masaharu Hida , Shigeyoshi Umemiya , Masaki Kurasawa
- 申请人地址： JP Kawasaki
- 专利权人： Fujitsu Limited
- 当前专利权人： Fujitsu Limited
- 当前专利权人地址： JP Kawasaki
- 代理机构： Westerman, Hattori, Daniels & Adrian, LLP
- 优先权： JP2002-251264 20020829
- 主分类号： H01L27/04
- IPC分类号： H01L27/04 ; H01L21/02 ; H01L21/314 ; H01L21/316 ; H01L21/822 ; H01L21/8246 ; H01L27/105 ; H01L41/08 ; H01L41/09 ; H01L41/18 ; H01L41/22 ; H01L41/29 ; H01L41/318 ; H03H3/08 ; H03H9/02 ; H01L29/76
摘要：
A device having a capacitor element includes: an underlying body having a non-orientated first surface; a lower electrode formed on the first surface of the underlying body, the lower electrode containing conductive metal oxide and not containing noble metal, such as LaNiO3, the conductive metal oxide having a (0 0 1) orientated ABO3 type pervskite structure; a ferroelectric layer formed on the lower electrode, having a rhombohedral ABO3 type pervskite structure, the ferroelectric layer being preferentially (0 0 1) orientated in conformity with the orientation of the lower electrode, and an upper electrode formed on the ferroelectric layer.
公开/授权文献
- US20040043520A1 Device having capacitor and its manufacture 公开/授权日：2004-03-04